Investigation on Displacement Measurements in the Large Measuring Range by Utilizing Multibeam Interference

Shyu, Lih Horng; Wang, Yun-Che; Chang, Chung Ping; Tung, Pi Cheng; Manske, Eberhard

doi:10.1166/sl.2012.2302

Cited by 4 publications

(1 citation statement)

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“…For this reason, the dynamic length measurement within the large measuring range is also hard to realize. The polarized Fabry-Pérot interferometer was presented in our previous study [24][25][26][27][28][29]. By utilizing the polarized phase-shifted method, one octadic-wave plate (λ/8) is introduced into the optical cavity.…”

Section: Introductionmentioning

confidence: 99%

Linear Displacement Calibration System Integrated with a Novel Auto-Alignment Module for Optical Axes

Shih

Tung

Wang

et al. 2020

Sensors

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The quality of processed workpieces is affected directly by the precision of the linear stage. Therefore, the linear displacement calibration of machine tools must be implemented before delivery and after employment for a period of time. How to perform a precise calibration with high inspection efficiency is a critical issue in the precision mechanical engineering industry. In this study, the self-developed system integrated by the measurement module based on the common path Fabry–Pérot interferometer for linear displacement and the auto-alignment module for optical axes was proposed to realize the automatic linear displacement calibration of the linear stages. The measurement performance of the developed structure was verified experimentally. With the auto-alignment module, the cosine error was reduced to 0.36 nm and the entire procedure accomplished within 75 s without the limitation of the perceived resolution of the human eye, operational experience, and the risk of misalignment and broken cable. According to the comparison of experimental results for the linear displacement, the repeatability of the proposed measurement module was less than 0.171 μm. After the compensation procedure according to the linear displacement calibration, the systematic positional deviation, repeatability, and accuracy of the linear axis could be improved to 4 μm, 1 μm, and 5 μm respectively. Hence, the calibration efficiency can be improved by 80% with the proposed compact system, which is beneficial for the linear displacement calibration of machine tools in the precision mechanical engineering industry.

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Section: Introductionmentioning

confidence: 99%

Linear Displacement Calibration System Integrated with a Novel Auto-Alignment Module for Optical Axes

Shih

Tung

Wang

et al. 2020

Sensors

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View full text Add to dashboard Cite

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Fabry–Perot displacement interferometer for the measuring range up to 100 mm

et al. 2013

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Automatic calibration system for micro-displacement devices

Shih¹,

Wang²,

Shyu³

et al. 2018

Meas. Sci. Technol.

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With the industrial development and the advances in micro-displacement technology, the demands on piezo transducers are increasing. For piezo transducers, the error inspections of the non-linearity and the hysteresis are necessary procedure before piezo transducers utilized. Due to the possible decline or damage during the employment of the transducers, it is important to provide the automatic calibration system. In this investigation, a self-developed automatic calibration system for micro-displacement devices is proposed. The automatic system according to the international specification of ASTM-E2309 has been developed. This system designed for the calibration of piezo transducers is based on the interferometric structure of the common optical path and possesses the resolution of the nanometer order. The experimental verifications demonstrate that the repeatability of the Fabry-Perot interferometer is less than 11 nm. Experimental results of the synchronic measurement with the self-developed interferometer and a commercial interferometer reveal that the differences of the maximum nonlinearity error and maximum hysteresis error are less than 1%. With the proposed correct equations, the maximum nonlinearity error can be minimized to 1% and the maximum hysteresis error will be less than 5.2%.

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Investigation on Displacement Measurements in the Large Measuring Range by Utilizing Multibeam Interference

Cited by 4 publications

References 0 publications

Linear Displacement Calibration System Integrated with a Novel Auto-Alignment Module for Optical Axes

Linear Displacement Calibration System Integrated with a Novel Auto-Alignment Module for Optical Axes

Fabry–Perot displacement interferometer for the measuring range up to 100 mm

Automatic calibration system for micro-displacement devices

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