Investigation of X and Y Configuration Modal and Dynamic Response to Velocity Excitation of the Nanometer Resolution Linear Servo Motor Stage with Quasi-Industrial Guiding System in Quasi-Stable State
Abstract:Research institutions and industrial enterprises demand high accuracy and precision positioning systems to fulfil cutting edge requirements of up-to-date technological processes in the field of metrology and optical fabrication. Linear motor system design with high performance mechanical guiding system and optical encoder ensures nanometer scale precision and constant static error, which can be calibrated by optical instruments. Mechanical guiding systems has its benefits in case of control theory and its stab… Show more
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