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2013
DOI: 10.1016/j.mee.2012.04.005
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Investigation of total reflection X-ray fluorescence calibration with picoliter deposition arrays

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Cited by 8 publications
(3 citation statements)
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References 11 publications
(13 reference statements)
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“…The Si K‐lines from the Si‐carrier showed a strong overlap with the P K‐line. Just recently, Sparks et al . showed that detection limits for TXRF analysis of P on Si‐Wafers compared with P on Al 2 O 3 rise over more than one order of magnitude because of this overlap.…”
Section: Methodsmentioning
confidence: 99%
“…The Si K‐lines from the Si‐carrier showed a strong overlap with the P K‐line. Just recently, Sparks et al . showed that detection limits for TXRF analysis of P on Si‐Wafers compared with P on Al 2 O 3 rise over more than one order of magnitude because of this overlap.…”
Section: Methodsmentioning
confidence: 99%
“…Patterns of various shapes were tested and showed that a ring-shaped sample was the best option, proved both theoretically and experimentally. Sparks et al 71 showed that a standard calibration wafer for quantiable-contamination control by TXRF could be made, using deposition of pico-litre quantities of equivalent metal-contamination solution on a silicon wafer surface in uniform arrays of residues. A linear calibration curve could be generated within these arrays from increasing concentrations using NIST traceable metal standards and the exact volume of all arrays deposited on a single wafer.…”
Section: Txrf and Related Techniquesmentioning
confidence: 99%
“…Thermal inkjet printing has been used in X-ray fluorescence analysis (XRF). Picoliter droplets have been explored for calibration of microscopic sample deposits in the analysis of atmospheric aerosols [ 37 ] as well as in semiconductor analysis [ 38 , 39 ]. The micro deposits out of standard solutions all have a similar shape [ 40 ].…”
Section: Introductionmentioning
confidence: 99%