“…The Si K‐lines from the Si‐carrier showed a strong overlap with the P K‐line. Just recently, Sparks et al . showed that detection limits for TXRF analysis of P on Si‐Wafers compared with P on Al 2 O 3 rise over more than one order of magnitude because of this overlap.…”
“…The Si K‐lines from the Si‐carrier showed a strong overlap with the P K‐line. Just recently, Sparks et al . showed that detection limits for TXRF analysis of P on Si‐Wafers compared with P on Al 2 O 3 rise over more than one order of magnitude because of this overlap.…”
“…Patterns of various shapes were tested and showed that a ring-shaped sample was the best option, proved both theoretically and experimentally. Sparks et al 71 showed that a standard calibration wafer for quantiable-contamination control by TXRF could be made, using deposition of pico-litre quantities of equivalent metal-contamination solution on a silicon wafer surface in uniform arrays of residues. A linear calibration curve could be generated within these arrays from increasing concentrations using NIST traceable metal standards and the exact volume of all arrays deposited on a single wafer.…”
“…Thermal inkjet printing has been used in X-ray fluorescence analysis (XRF). Picoliter droplets have been explored for calibration of microscopic sample deposits in the analysis of atmospheric aerosols [ 37 ] as well as in semiconductor analysis [ 38 , 39 ]. The micro deposits out of standard solutions all have a similar shape [ 40 ].…”
A quartz crystal microbalance (QCM) is described, which simultaneously determines resonance frequency and bandwidth on four different overtones. The time resolution is 10 milliseconds. This fast, multi-overtone QCM is based on multi-frequency lockin amplification. Synchronous interrogation of overtones is needed, when the sample changes quickly and when information on the sample is to be extracted from the comparison between overtones. The application example is thermal inkjet-printing. At impact, the resonance frequencies change over a time shorter than 10 milliseconds. There is a further increase in the contact area, evidenced by an increasing common prefactor to the shifts in frequency, Δf, and half-bandwidth, ΔΓ. The ratio ΔΓ/(−Δf), which quantifies the energy dissipated per time and unit area, decreases with time. Often, there is a fast initial decrease, lasting for about 100 milliseconds, followed by a slower decrease, persisting over the entire drying time (a few seconds). Fitting the overtone dependence of Δf(n) and ΔΓ(n) with power laws, one finds power-law exponents of about 1/2, characteristic of semi-infinite Newtonian liquids. The power-law exponents corresponding to Δf(n) slightly increase with time. The decrease of ΔΓ/(−Δf) and the increase of the exponents are explained by evaporation and formation of a solid film at the resonator surface.
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