The tracking detector of ATLAS, one of the experiments at the Large Hadron Collider (LHC), will be upgraded in 2024-2026 to cope with the challenging environment conditions of the High Luminosity LHC (HL-LHC). The LPNHE, in collaboration with FBK and INFN, has produced 130 µm thick n − on − p silicon pixel sensors which can withstand the expected large particle fluences at HL-LHC, while delivering data at high rate with excellent hit efficiency. Such sensors were tested in beam before and after irradiation both at CERN-SPS and at DESY, and their performance are presented in this paper. Beam test data indicate that these detectors are suited for all the layers where planar sensors are foreseen in the future ATLAS tracker: hit-efficiency is greater than 97% for fluences of Φ 7 × 10 15 n eq /cm 2 and module power consumption is within the specified limits. Moreover, at a fluence of Φ = 1.3 × 10 16 n eq /cm 2 , hit-efficiency is still as high as 88% and charge collection efficiency is about 30%. Hardness 1 ATLAS uses a right-handed coordinate system with its origin at the nominal interaction point (IP) in the centre of the detector and the z-axis coinciding with the axis of the beam pipe. The x-axis points from the IP towards the centre of the LHC ring, and the y-axis points upward. Cylindrical coordinates (r,φ) are used in the transverse plane, φ being the azimuthal angle around the z-axis. The pseudorapidity is defined in terms of the polar angle θ as η = − ln tan(θ/2).