Abstract:The metal films are widely used in the Inertial Confinement Fusion (ICF) experiments to obtain the radiation opacity, and the accuracy of the measuring results mainly depends on the accuracy of the film thickness and thickness uniformity. The traditional used measuring methods all have various disadvantages, the optical method and stylus method cannot provide mass thickness which reflects the internal density distribution of the films, and the weighing method cannot provide the uniformity of the thickness dist… Show more
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