Investigation of the surface layer thickness uniformity at the magnetron sputtering depending on the geometry of the flow

Nasakina, E. O.; Sudarchikova, M. A.; Спрыгин, Г. С.; Baskakova, M. I.; Fedyuk, I. M.; Bespamiatnova, A.; Данилова, Е. А.; Konushkin, S. V.; Леонов, А. В.; Sevostyanov, M. A.; Колмаков, А. Г.

doi:10.1088/1757-899x/525/1/012062

Cited by 1 publication

(1 citation statement)

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“…A variation of 8.7 mg per cm 2 across the electrode areas was observed due to the non-uniformity of film thickness. A variation in layer thickness is commonly observed for sputtering processes employing circular targets of limited sizes, where the coating thickness depends on the flow geometry [25]. A variation of 25% was, however, considered to be acceptable for the investigation.…”

Section: Iron Oxide Nanomaterialsmentioning

confidence: 99%

Magnetron Sputtering as a Versatile Tool for Precise Synthesis of Hybrid Iron Oxide–Graphite Nanomaterial for Electrochemical Applications

Käufer,

Quade,

Kruth

et al. 2024

Nanomaterials

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Iron oxide nanomaterials are promising candidates for various electrochemical applications. However, under operating conditions high electric resistance is still limiting performance and lifetime. By incorporating the electronically conductive carbon into a nanohybrid, performance may be increased and degeneration due to delamination may be prevented, eliminating major drawbacks. For future applications, performance is an important key, but also cost-effective manufacturing suitable for scale-up must be developed. A possible approach that shows good potential for up-scale is magnetron sputtering. In this study, a systematic investigation of iron oxides produced by RF magnetron sputtering was carried out, with a focus on establishing correlations between process parameters and resulting structural properties. It was observed that increasing the process pressure was favourable with regard to porosity. Over the entire pressure range investigated, the product consisted of low-crystalline Fe3O4, as well as Fe2O3 as a minor phase. During sputtering, a high degree of graphitisation of carbon was achieved, allowing for sufficient electronic conductivity. By means of a new alternating magnetron sputtering process, highly homogeneous salt-and-pepper-type arrangements of both nanodomains, iron oxide and carbon were achieved. This nano-containment of the redox-active species in a highly conductive carbon domain improves the material’s overall conductivity, while simultaneously increasing the electrochemical stability by 44%, as confirmed by cyclic voltammetry.

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Section: Iron Oxide Nanomaterialsmentioning

confidence: 99%