1998
DOI: 10.1016/s0040-6090(97)00656-1
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Investigation of the kinetics of crystallisation of Al/a-Ge bilayer by electrical conductivity measurement

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Cited by 12 publications
(5 citation statements)
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“…A few results have also been reported for the Al-induced crystallization of amorphous Ge films [19][20][21][22], however the available experimental evidence at present is still too limited to allow any definitive conclusions. The situation is even worse for SiGe-alloys.…”
Section: Aluminium-induced Crystallization Of Sige Filmsmentioning
confidence: 99%
“…A few results have also been reported for the Al-induced crystallization of amorphous Ge films [19][20][21][22], however the available experimental evidence at present is still too limited to allow any definitive conclusions. The situation is even worse for SiGe-alloys.…”
Section: Aluminium-induced Crystallization Of Sige Filmsmentioning
confidence: 99%
“…Each of these types requires a different type of process analytical tool or method for the process progress evaluation. Advances have been made in the modeling, monitoring, and control of the crystals [ 33 ] and one-dimensional PAT evaluations, involving combined cooling and antisolvent crystallization by measuring temperatures and analyzing microscopic images of crystals [ 34 ], along with observation of kinetics [ 35 ]. Electrical resistance tomography is one of the novel process analytical tools used to monitor the crystallization process.…”
Section: Introductionmentioning
confidence: 99%
“…Detailed investigations of AIC of Si have been carried out by many researchers (14)(15)(16)(17). On the other hand, there are only a few reports for AIC of Ge (18)(19)(20)(21), and the available experimental information is still too limited to reveal the mechanism of AIC of Ge. Understanding of AIC of Ge is expected to establish a new technique for formation of high-quality poly-SiGe at a low temperature.…”
Section: Introductionmentioning
confidence: 99%