2004
DOI: 10.1002/sia.1811
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Investigation of the electronic structure of the phosphorus‐doped Si and SiO2:Si quantum dots by XPS and HREELS methods

Abstract: The system of the nanocrystals of Si in the SiO 2 matrix (SiO 2 : Si) attracts a great amount of attention due to its ability for luminescence in the visible and near-IR range of spectrum. The influence of the P ion doping was investigated for the electronic structure of the Si single crystal and the SiO 2 : Si nanocomposite. The P doping of SiO 2 implanted with Si + and post-annealed at T = 1000 • C (2 h) results in the enhancement of the PL peak connected with the Si nanocrystals. Owing to the low concentrat… Show more

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Cited by 31 publications
(15 citation statements)
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References 8 publications
(6 reference statements)
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“…14, 45 The XPS data demonstrate that, during the annealing process, the diffusing P atoms are trapped in the Si NC region and incorporated in the core of the nanostructure or in a sub-interface region exhibiting no bonds with O atoms. The sensitivity of the XPS measurements does not allow excluding the presence of a residual amount of P in the surrounding SiO 2 matrix.…”
Section: Resultsmentioning
confidence: 99%
“…14, 45 The XPS data demonstrate that, during the annealing process, the diffusing P atoms are trapped in the Si NC region and incorporated in the core of the nanostructure or in a sub-interface region exhibiting no bonds with O atoms. The sensitivity of the XPS measurements does not allow excluding the presence of a residual amount of P in the surrounding SiO 2 matrix.…”
Section: Resultsmentioning
confidence: 99%
“…5b) significantly. As it was shown earlier [1], this etching allowed to reach the subsurface layers with maximal concentration of P and Si. The peaks at 44, 95, 157 and 250 meV are clearly resolved.…”
Section: Hreels Investigation Of Interband Transitionsmentioning
confidence: 74%
“…The dispersion of Si particles significantly increases the luminescence of non-direct band semiconductors. It was found earlier that ion doping of the nanocrystalline Si by donor elements gives additional increase of PL and changes its electronic structure [1]. However, up to present time, the influence of doping was investigated insufficiently and present data have discordance.…”
Section: Introductionmentioning
confidence: 91%
“…It was established earlier that ion doping of the nanocrystalline Si by donor elements gives an additional increase of PL and changes its electronic structure. 3 The mechanisms of phosphorus influence on PL properties are unknown, although some assumptions were suggested in Refs 4 and 5. The present paper deals with the influence of P doping on the electronic structure and properties of (SiO 2 : Si) and (Al 2 O 3 : Si) nanocomposites and interfaces.…”
Section: Introductionmentioning
confidence: 99%