Investigation of the Electron Energy Distribution Function in Capacitively Coupled (13.56 MHz) Radio Frequency Discharge in Dry Air

Abstract

In this study, the electron energy distribution function in capacitively coupled radio frequency dry air discharge in three different regions along discharge tube was measured. It was observed that all regions do have Fermi electron energy distribution function which increases in magnitude with increasing the applied power, and decreasing with increasing the internal pressure. This function magnitude reaches its highest value near the powered electrode, while it decreases towards the earthed one.