Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning

Sahir, Samrina; Yerriboina, Nagendra Prasad; Han, Sung Hee; Han, Kwang-Min; Kim, Tae-Gon; Mahadev, Niraj; Park, Jin-Goo

doi:10.1016/j.apsusc.2021.149035

Cited by 35 publications

(32 citation statements)

References 28 publications

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“…As for CeF 3 :Yb 3+ , Er 3+ /Fe-ATP, the wavenumber of 1410 cm –1 is ascribed to the Ce–F bond, and the 3448 cm –1 is attributed to the stretching vibration of −OH in absorbed water. Compared to Fe-ATP and ATP, the peak of CeF 3 :Yb 3+ , Er 3+ /Fe-ATP near 803 cm –1 is broadened, which may be tentatively associated with the stretching vibration of the Si–O–Ce bond and attributed to the construction of the CeF 3 :Yb 3+ , Er 3+ /Fe-ATP heterostructure …”

Section: Resultsmentioning

confidence: 92%

“…Compared to Fe-ATP and ATP, the peak of CeF 3 :Yb 3+ , Er 3+ /Fe-ATP near 803 cm −1 is broadened, which may be tentatively associated with the stretching vibration of the Si−O−Ce bond and attributed to the construction of the CeF 3 :Yb 3+ , Er 3+ /Fe-ATP heterostructure. 28 TEM Analysis. The TEM patterns of CeF 3 :Yb 3+ , Er 3+ /Fe-ATP nanocomposites with various loading amounts and the corresponding EDS image are given in Figure 4.…”

Section: ■ Experimental Sectionmentioning

confidence: 99%

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Dual Active Sites Boosting Photocatalytic Nitrogen Fixation over Upconversion Mineral Nanocomposites under the Full Spectrum

Zuo

Zhang

et al. 2022

ACS Sustainable Chem. Eng.

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Photocatalytic nitrogen fixation has been considered as one of the most potential alternatives for the synthesis of ammonia; however, how to make full use of solar energy and how to cleave the strong NN bond remain great challenges. Herein, the attapulgite (ATP) mineral was modified with iron followed by the immobilization of doped CeF 3 nanoparticles to form a CeF 3 :Yb 3+ , Er 3+ /Fe-ATP heterostructure, which was utilized as a photocatalyst for nitrogen fixation. Results showed that doping of the activator Yb 3+ and the sensitizer Er 3+ generated fluorine vacancies (F v ) in the CeF 3 matrix, which formed dual active sites with Fe ions in ATP, benefiting the adsorption and activation of N 2 molecules. In addition, Fe-reconstructed ATP had a narrow band gap responsive in the visible region, while CeF 3 -doped Yb 3+ and Er 3+ facilitated transforming near-infrared light (NIR) into ultraviolet (UV) and visible light, both of which contributed to extending the harvest range in the full spectrum. The influence of the Er 3+ doping ratio and loading amount of fluoride on the generation of ammonia was explored. Notably, the separation of photogenerated charge carriers and the redox potentials was enhanced due to the rational indirect Z-scheme heterostructure mediated by F v . Under solar light irradiation, the NH 4 + production rate achieved the highest value of 253.6 μmol•h −1 •g −1 when the Er doping amount was optimized to be 3 mol % and the loading of CeF 3 :Yb 3+ , Er 3+ was 20 wt %, and it even reached 40.3 μmol•h −1 •g −1 under NIR irradiation. The current study may offer a sustainable strategy to use full solar energy and natural minerals for efficient ammonia synthesis.

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Section: Resultsmentioning

confidence: 92%

Section: ■ Experimental Sectionmentioning

confidence: 99%

Dual Active Sites Boosting Photocatalytic Nitrogen Fixation over Upconversion Mineral Nanocomposites under the Full Spectrum

Zuo

Zhang

et al. 2022

ACS Sustainable Chem. Eng.

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“…9 , the octahedral CeO 2 in water is terminated with Ce–OH 2 + due to the positive zeta potential while the surface of the K9 wafer is Si–O − . 43 The opposite surface charge between K9 surface and the calcined octahedrons leads to a strong electrostatic attraction. Under certain pressure, Ce–OH 2 + on the surface of octahedrons will react with Si–O − to form Ce–O–Si bonds, thus weakening the Si–O–Si bonds on K9 surface layer.…”

Section: Resultsmentioning

confidence: 99%

Changing the calcination temperature to tune the microstructure and polishing properties of ceria octahedrons

Wang

Ding

et al. 2022

RSC Adv.

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“…During CMP, the OH groups on the ceria surface form strong Ce–O–Si bonds with Si–OH groups on the glass surface. The Ce–O–Si bonds are much stronger than Si–O–Si bonds, leading to the removal of SiO 2 . , Ce 3+ sites help the formation of Ce–OH groups at the CeO 2 surface through H 2 O dissociation and facilitate the breaking up of Si–O bonds during polishing. − ,, From the perspective of the chemical effect of CMP, the surface Ce 3+ concentration of the products calcined at 800–900 °C is high and they should have better polishing performance.…”

Section: Resultsmentioning

confidence: 99%

Synthesis of Hierarchical Layered Quasi-Triangular Ce(OH)CO₃ and Its Thermal Conversion to Ceria with High Polishing Performance

Gui-hua

et al. 2023

ACS Omega

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Layered quasi-triangular Ce(OH)CO 3 assembled from primary nanoparticles was synthesized via a solvothermal method and converted into CeO 2 abrasive particles by calcination at 800−1000 °C. With the increase of calcination temperature, the primary particle size increased and the microstructure, mechanical hardness, and chemical activity of the CeO 2 particles changed, thus affecting the polishing performance. The calcined products obtained at 800, 850, and 900 °C maintained the layered edge structure of the Ce(OH)CO 3 precursor and had a relatively high specific surface area and surface Ce 3+ concentration. The samples calcined at 950 and 1000 °C lost the layered structure due to the large-scale melting of the primary particles, and their surface chemical activity decreased. The polishing experiments on K9 glass showed that, with the calcination temperature rising from 800 to 1000 °C, the material removal rate (MRR) first increased and then decreased sharply. The initial increase of MRR was attributed to the increase of mechanical hardness of the layered quasi-triangular CeO 2 , and the subsequent decrease of MRR was related to the decrease in surface chemical activity and disappearance of the layered edge structure. The product calcined at 900 °C had the highest MRR and best surface quality after polishing due to the layered edge structure and optimal match of chemical activity and mechanical hardness.

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Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning

Cited by 35 publications

References 28 publications

Dual Active Sites Boosting Photocatalytic Nitrogen Fixation over Upconversion Mineral Nanocomposites under the Full Spectrum

Dual Active Sites Boosting Photocatalytic Nitrogen Fixation over Upconversion Mineral Nanocomposites under the Full Spectrum

Changing the calcination temperature to tune the microstructure and polishing properties of ceria octahedrons

Synthesis of Hierarchical Layered Quasi-Triangular Ce(OH)CO₃ and Its Thermal Conversion to Ceria with High Polishing Performance

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Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning

Cited by 35 publications

References 28 publications

Dual Active Sites Boosting Photocatalytic Nitrogen Fixation over Upconversion Mineral Nanocomposites under the Full Spectrum

Dual Active Sites Boosting Photocatalytic Nitrogen Fixation over Upconversion Mineral Nanocomposites under the Full Spectrum

Changing the calcination temperature to tune the microstructure and polishing properties of ceria octahedrons

Synthesis of Hierarchical Layered Quasi-Triangular Ce(OH)CO3 and Its Thermal Conversion to Ceria with High Polishing Performance

Contact Info

Product

Resources

About

Synthesis of Hierarchical Layered Quasi-Triangular Ce(OH)CO₃ and Its Thermal Conversion to Ceria with High Polishing Performance