Investigation of the Deposition of Multicomponent Coatings Using Cathodic Arc Evaporation with Direct Synthesis Reactions

Abstract

The paper describes the results obtained when investigating a deposition of multicomponent coatings using cathodic arc evaporation (CAE) with direct synthesis reactions. The sequence of phase generation in coatings is found to correlate with the energy of their formation. Special attention is paid to the difference in the processes of phase formation which occurs during deposition of multicomponent and mono-component coatings.