Investigation of the BN films prepared by low pressure chemical vapor deposition

Point defects in hexagonal BN, BC3 and BCxN compounds studied by x-ray absorption near-edge structure

“…3,13 Highly oriented polycrystalline h-BN bulk samples are also obtained by compressionannealed pyrolysis. 14 Furthermore, CVD [15][16][17][18][19][20] and PVD 10,15,[21][22][23][24][25][26] techniques have been extensively employed to grow h-BN thin films with different degrees of structural disorder. With the advent of nanotechnology, a number of BN nanostructures such as nanotubes, nanoribbons or fullerenes have been successfully produced by chemical or physical methods.…”

“…In contrast, h-BN thin films and BN nanomaterials are commonly synthesized outside the thermodynamic equilibrium through processes involving energetic particles (e.g., ions or electrons), what leads to more defective structures. For example, plasmas or directional bombardment of N 2 þ and/or Ar þ ions are often used for h-BN thin film deposition 10,15,17,18,20,[22][23][24][25][26] and BN nanotube formation. 27,28 Also, nanoribbons 29,30 and fullerenes 28,31 of BN have been produced with the help of electron beam irradiation.…”

Boron nitride coatings by chemical vapor deposition from borazine

“…Chemical vapor deposition (CVD) has been widely used for preparing boron nitride coatings with high purity and high density [3,4]. Boron nitride was prepared by CVD generally from the reaction system BX 3 -NH 3 (the X can be F, Cl, or Br) [5][6][7]. However, there were always problems of corrosive byproducts (such as HF and HCl) and the presence of the solid byproducts such as NH 4 Cl.…”

Combustion synthesis of boron nitride via magnesium reduction using additives

“…Many methods have been developed for synthesis of hexagonal BN including classical high-temperature routes [1,3] (e.g., reaction of boron oxide and ammonia [16], direct nitridation of boron with N 2 [1] and carbothermal reduction and nitridation of boron oxide [17]), vapor deposition methods (e.g., reaction of boron trichloride and ammonia [18]), condensed-phase pyrolysis techniques (e.g., thermal decomposition of borazene or bisborazinylamine [19]), solid-state metathesis [7,20,21], pyrolysis [4,10,12,22] and combustion synthesis [23][24][25]. Most of these methods have to be carried out under a high temperature heating or a high N 2 pressure and require a long processing time.…”