2013
DOI: 10.1088/1757-899x/53/1/012090
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Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application

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Cited by 6 publications
(8 citation statements)
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“…In the present work, Taguchi's L9 orthogonal array was used to organize the input parameters (voltage, pulse duration, and tool speed) and their levels . The input parameters and their levels were selected based on the work reported in the area of EDM of nonconductive materials . Each set of experiment was repeated at least three times to nullify any random variation in the experimental data.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…In the present work, Taguchi's L9 orthogonal array was used to organize the input parameters (voltage, pulse duration, and tool speed) and their levels . The input parameters and their levels were selected based on the work reported in the area of EDM of nonconductive materials . Each set of experiment was repeated at least three times to nullify any random variation in the experimental data.…”
Section: Methodsmentioning
confidence: 99%
“…The major advantages of DESSEDG were high efficiency, low processing cost, environment friendliness, and so on. Sabur et al performed μEDM process for making blind holes on nonconductive zirconia for microelectromechanical (MEMS) application. A layer of copper sheet having conductive adhesive was applied over the work surface to initiate the spark.…”
Section: Literature Surveymentioning
confidence: 99%
“…light interferometry. The power settings of the micro-EDM process were gradually increased to obtain surfaces with increasing roughness [30]. The R a (R z ) values increased from 5.1±1.0 nm (0.1±0.1 μm) for untreated electrodes to 198.3±19.1 nm (2.2±0.2 μm), 347.6±15.5 nm (3.3±0.2 μm) and 681.6±127.8 nm (5.3±0.7 μm) for treated electrodes with low, medium and high roughness machining settings, respectively.…”
Section: Electrode Surface Modification and Characterizationmentioning
confidence: 99%
“…However, when machining ceramics, the increase has its limit to allow the formation of a carbon layer under the given machining conditions. According to sources from the literature, when machining ceramics, the duty factor ranges from 20 ÷ 50% [11,12]. When machining with higher discharge currents and pulse duration, it is desirable that this coefficient moves to lower values.…”
Section: Fig 2 Edm Machine Agie Charmilles Of the Sp1-u Typementioning
confidence: 99%