Investigation of Surface Phase Layers on GaAs after Selective Chemical Etching

Abstract

Normal 0 false false false RU X-NONE X-NONE The combination of methods of voltammetry, Raman spectroscopy, and X-ray reflectometry for the first time has been applied for the more comprehensive investigation of interfacial boundaries of GaAs, i.e. determination of phase distribution and thickness of the phase layers. The conditions for the formation of elemental arsenic on a GaAs surface in the process of selective dissolution are discussed. The stability of interfacial boundaries in air has also been studied. The investigations have shown that air storage lead to the oxidation of formed As0 and reorganization of GaAs interfacial boundary accompanied by the formation of Ga2O3 and As0 as a result of a reaction between As2O3 and GaAs. The results on interfacial boundaries composition were found to be correlated with the theoretical data. /* Style Definitions */ table.MsoNormalTable {mso-style-name:"Обычная таблица"; mso-tstyle-rowband-size:0; mso-tstyle-colband-size:0; mso-style-noshow:yes; mso-style-priority:99; mso-style-parent:""; mso-padding-alt:0cm 5.4pt 0cm 5.4pt; mso-para-margin-top:0cm; mso-para-margin-right:0cm; mso-para-margin-bottom:10.0pt; mso-para-margin-left:0cm; line-height:115%; mso-pagination:widow-orphan; font-size:11.0pt; font-family:"Calibri","sans-serif"; mso-ascii-font-family:Calibri; mso-ascii-theme-font:minor-latin; mso-hansi-font-family:Calibri; mso-hansi-theme-font:minor-latin; mso-bidi-font-family:"Times New Roman"; mso-bidi-theme-font:minor-bidi; mso-fareast-language:EN-US;}