2016
DOI: 10.2109/jcersj2.15153
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Investigation of structure of a thin SiO<sub>2</sub> layer as an antifouling and corrosion-resistant coating

Abstract: The structures of a SiO 2 layers synthesized using perhydropolysilazane [PHPS, labeled as SiO 2 (PHPS)] on both Si and Fe/Si substrates were studied using Fourier transform infrared spectroscopy (FT-IR) and neutron reflectivity (NR) analysis. The FT-IR results revealed that no unreacted PHPS remained and that the primary component of the SiO 2 (PHPS) layer could be considered to be SiO 2 . The NR analysis suggested that a uniform SiO 2 (PHPS) layer was synthesized on the Si and Fe/Si substrate and that the den… Show more

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Cited by 8 publications
(10 citation statements)
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“…Table 1 shows the structural parameters obtained from this analysis. The structural parameters of the PDS/Fe/Si sample, that is the results of our previous work [5], are also shown in Table 1 to highlight the influence of the substrate on PDS nano-structure. The thickness (t) and scattering length density (SLD, ρ) values of the PDS thin layers were estimated to be 461 Å and 2.10 × 10 −6 Å −2 for PDS/Si, 436 Å and 1.86 × 10 −6 Å −2 for PDS/Al 2 O 3 , 1809 Å and 1.00 × 10 −6 Å −2 for PDS/MgO, and 430 Å and 1.99 × 10 −6 Å −2 for PDS/PVA/Si samples, respectively.…”
Section: Neutron Reflectivity Analysis For Pds Thin Layer Samplesmentioning
confidence: 98%
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“…Table 1 shows the structural parameters obtained from this analysis. The structural parameters of the PDS/Fe/Si sample, that is the results of our previous work [5], are also shown in Table 1 to highlight the influence of the substrate on PDS nano-structure. The thickness (t) and scattering length density (SLD, ρ) values of the PDS thin layers were estimated to be 461 Å and 2.10 × 10 −6 Å −2 for PDS/Si, 436 Å and 1.86 × 10 −6 Å −2 for PDS/Al 2 O 3 , 1809 Å and 1.00 × 10 −6 Å −2 for PDS/MgO, and 430 Å and 1.99 × 10 −6 Å −2 for PDS/PVA/Si samples, respectively.…”
Section: Neutron Reflectivity Analysis For Pds Thin Layer Samplesmentioning
confidence: 98%
“…The Motofit program [16] was used to fit the NR profiles using the least-squares approach to minimize deviations in the fit; the thickness, scattering length density (SLD) [5], and Gaussian roughness were evaluated by the program.…”
Section: Neutron Reflectivity Measurements and Data Analysismentioning
confidence: 99%
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