Investigation of QTF based gas sensors

Sampson, S Abraham; Date, Kalyani; Panchal, Suresh; Ambrale, Ajit; Datar, Suwarna

doi:10.1016/j.snb.2015.04.024

Cited by 23 publications

(14 citation statements)

References 30 publications

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“…PMMA is only slightly swelled by water (4.5%), while alcohols can swell PMMA approximately eight times more than water (38%) . These results confirm that the sensitivity and selectivity of a polymer wire-coated QTF gas sensor can be tuned by changing the polymer properties …”

Section: Resultssupporting

confidence: 63%

“…QCMs and microcantilevers can measure the changes in mass and stress occurred only on the sensor surface, whereas QTFs can measure changes in the mass and stress of a free-standing sample attached between the two prongs. The free-standing sample, for instance, a polymer wire or a polymer membrane, is stretched and compressed by the two vibrating prongs and the change in the mechanical properties of the sample can be measured from the change in the resonance frequency. − …”

mentioning

confidence: 99%

“…21 These results confirm that the sensitivity and selectivity of a polymer wire-coated QTF gas sensor can be tuned by changing the polymer properties. 11…”

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confidence: 99%

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Performance Enhancement of a Microfabricated Resonator Using Electrospun Nanoporous Polymer Wire

et al. 2017

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A nanoporous poly(methyl methacrylate) (PMMA) wire was prepared by electrospinning under high humidity and attached between two prongs of a microfabricated quartz tuning fork (QTF). Exposure of the QTF to ethanol vapor caused a frequency shift due to a decrease in the modulus of the PMMA wire, and the frequency change increased as the concentration of ethanol vapor increased. The nanoporous wire-coated QTF exhibited higher sensitivity and faster response time than a plain wire-coated QTF, which was attributed to the high surface area and pore networks facilitating the transport of ethanol molecules inside the PMMA wire.

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Section: Resultssupporting

confidence: 63%

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confidence: 99%

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Performance Enhancement of a Microfabricated Resonator Using Electrospun Nanoporous Polymer Wire

et al. 2017

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“…Quartz tuning forks (QTFs) are single crystal quartz mechanical oscillators whose piezoelectric material quartz allows the QTF to be excited electrically and its resonant frequency to be read out electrically [15,16]. In recent years, QTFs have been widely used as sensors due to their high stability, precision, large Q factor, low power consumption and high thermal stability.…”

Section: Introductionmentioning

confidence: 99%

Polymer-Modified Quartz Tuning Forks for Breath Biomarker Sensing

Ray

Desai²,

Parmar

et al. 2021

The 8th International Symposium on Sensor Science

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The change in levels of volatile organic compounds (VOC) present in exhaled breath can be indicative of bodily disorders. Detection of such low levels of VOCs can allow early detection and diagnosis of diseases. A polymer- modified Quartz Tuning Fork (QTF) is a promising, cost-effective sensor that can detect a change in ppm levels of VOCs exhaled from the breath at room temperature. Acetone and acetaldehyde are biomarkers that are readily exhaled by human beings. Increased levels of these analytes can serve as indicators for toxicity or a wide array of diseases. The present work uses an array of QTFs modified separately using nanomaterials embedded in polystyrene to detect low VOC concentrations present in simulated human breath successfully. The sensor response shows a clear distinction between healthy human breath and breath spiked with varying VOC concentrations (5–400 ppm). The sensor response proves it can potentially serve as an economical and non-invasive tool for disease diagnostics.

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“…To realise the purpose of low power consumption, integration of MOS nanostructured materials with microheater based on microelectromechanical systems (MEMS) technologies is an effective way and has been paid increasing attentions by researchers [7][8][9][10][11][12]. However, there are considerable challenges to realise the preparation of MOS nanostructured materials with excellent response characteristics and low power consumption for a gas sensor at the same time.…”

mentioning

confidence: 99%

Wafer‐level fabrication of low power consumption integrated alcohol microsensor

Wang

Lei

et al. 2019

Micro & Nano Letters

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An integrated alcohol microgas sensor was designed and fabricated based on TiO 2 /SnO 2 nanocomposites acting as a sensing layer and microheater providing working temperature. The stacked TiO 2 /SnO 2 nanocomposites were prepared by magnetron sputtering. A unique suspended membrane consisting of Si 3 N 4 /SiO 2 /Si 3 N 4 /SiO 2 four layers was prepared by different methods, respectively, and applied in microheater to support the electrodes and sensing layer for reducing power consumption. The fabrication process tackled the difficulty that the sensing layer preparation is incompatible with microelectromechanical systems micromachining technology and realised the mass production of the wafer-level sensor chips with good consistency. The microalcohol sensors showed excellent response characteristics for alcohol (50-600 ppm) detection at low power consumption (39 mW).

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Investigation of QTF based gas sensors

Cited by 23 publications

References 30 publications

Performance Enhancement of a Microfabricated Resonator Using Electrospun Nanoporous Polymer Wire

Performance Enhancement of a Microfabricated Resonator Using Electrospun Nanoporous Polymer Wire

Polymer-Modified Quartz Tuning Forks for Breath Biomarker Sensing

Wafer‐level fabrication of low power consumption integrated alcohol microsensor

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