Abstract:Si-N-O films have drawn researcher’s much attention recently due to their potential
superiority in blood compatibility of biomaterials. In this paper, Si-N-O films were synthesized on
<100> silicon substrates by pulsed reactive unbalanced magnetron sputtering a single crystal silicon
target with high purity in a mixture atmosphere of Ar and N2. XPS and FTIR results showed the
Si-N-O films synthesized at higher N2 flux could be described to random bonding model (RBM). In
RBM, the Si2p existed in the form … Show more
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