Investigation of Morphology and Electrical Properties of Structures Based on the Heterojunction Monocrystalline Si/Microcrystalline ZnO
A. R. Semenov,
V. G. Litvinov,
T. A. Kholomina
et al.
Abstract:The results of an experimental study of the surface morphology of zinc oxide films and the electrical properties of structures based on the monocrystalline Si/microcrystalline ZnO heterojunction are presented. The structure of zinc oxide films grown in an atmosphere of argon and oxygen is analyzed, and the size distribution of nanoscale fibers grown on its surface is obtained. The capacitance-voltage characteristics of the In/ZnO/n-Si/Al and Au/ ZnO/n-Si/Al heterostructures have been simulated. Based on the ca… Show more
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