Investigation of mechanics properties of an awl-shaped serpentine microspring for in-plane displacement with low spring constant-to-layout area

Chou, Hui-Min; Lin, Meng‐Ju; Chen, Rongshun

doi:10.1117/1.jmm.15.3.035003

Cited by 7 publications

(12 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…When Displacement Force nonliear linear 10% difference critical force Both the displacements of δ nonlinear and δ linear are functions of applied force F, and δ nonlinear = δ nonlinear (F) is calculated from Equation (9). From Equation (7) [34], δ linear = δ linear (F) is obtained. The corresponding applied force F was defined as the critical force in this work.…”

Section: Discussionmentioning

confidence: 99%

“…An ASSM can be made through silicon-based micromachining and measured force and displacement by a Microforce Testing System machine [34]. The fabrication processes and measurement are expressed in the Appendix A.…”

Section: Methodsmentioning

confidence: 99%

“…The scanning electron microscope (SEM) photograph revealed that the springs had good sidewall performance and a rectangular cross-section. In these figures, the linear theoretical models are cited from [34]. The nonlinear models are from Equation ( 9).…”

Section: Methodsmentioning

confidence: 99%

“…The nonlinear relationship between the force and displacement for the ASSMs occurs when the applied force is large. From the results, the nonlinear relationship between the displacement In these figures, the linear theoretical models are cited from [34]. The nonlinear models are from Equation (9).…”

Section: Methodsmentioning

confidence: 99%

“…Sharma and Gupta [32] designed a nonuniform serpentine spring for radio frequency MEMS switches; this design reduced actuating voltage. Chou, Lin, and Chen designed and analyzed the mechanical properties of awl-shaped serpentine microsprings (ASSMs) for in-plane and out-of-plane motion [33,34]. They found that under the same total effective lengths and folds, for the out-of-plane motion, the ASSMs had a smaller spring constant to layout area ratio than the traditional serpentine microsprings.…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Geometric Effect on the Nonlinear Force-Displacement Relationship of Awl-Shaped Serpentine Microsprings for In-Plane Deformation

2020

Self Cite

View full text Add to dashboard Cite

Even when made by brittle materials, awl-shaped serpentine microsprings (ASSMs) were found to have a nonlinear displacement–force relationship similar to springs made by ductile material. It is found that the nonlinear displacement–force relationship is due to the geometry and dimensions of the ASSMs. The geometric effect of the nonlinear force–displacement relationship of ASSMs for in-plane motion was investigated. A theoretical solution was derived to analyze this nonlinearity. By successfully fabricating and measuring an ASSM, the theoretical results agreed well with the experimental results. The results indicated that ASSMs have a nonlinear force–displacement relationship, which is similar to that of hardening springs. The taper angle has a significant effect on the nonlinear displacement of ASSMs. When the taper angle was small, no obvious effect appeared on the nonlinearity of the microsprings with different numbers of turns. When the beam length increased, the critical force for nonlinear deflection decreased.

show abstract

Section: Discussionmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Geometric Effect on the Nonlinear Force-Displacement Relationship of Awl-Shaped Serpentine Microsprings for In-Plane Deformation

2020

Self Cite

View full text Add to dashboard Cite

show abstract

Design and Simulation Analysis of A Z Axis Microactuator with Low Mode Cross-Talk

et al. 2020

View full text Add to dashboard Cite

For a vibration system, the best designed spring is compliant to a desired vibration mode while it is robust to other undesired modes. There are several types of spring design for displacing the proofmass along the x and y axes, however, very few designs of spring compliant to the z axis are introduced. Therefore, we propose a z axis microactuator in which the suspending spring is designed so that it is only compliant to vibration along the z axis. The suspending spring consists of straight beam stages mechanically coupled with each other via frames which are symmetrically designed around a center plate. The operation characteristics of the microactuator is investigated by theoretical expresses and numerical simulation. The frequency split between the z axis mode and undesired modes can obtain more than 45%. The operation frequency can be modified in a wide range, from 68 kHz to 400 kHz, by changing the dimensional parameters of spring beams. The spring beams can be lengthened to increase displacement in the z axis while the mode cross-talk is still suppressed. Compared to the previously reported researches, the current microactuator shows robustness to undesired vibration modes, which is potential for integration in low mode cross-talk multi-axis micro-stages and low-noise mechanical sensors.

show abstract

A novel design of compliant forceps with serpentine flexures

Bharanidaran

2020

Australian Journal of Mechanical Engineering

View full text Add to dashboard Cite

Investigation of mechanics properties of an awl-shaped serpentine microspring for in-plane displacement with low spring constant-to-layout area

Cited by 7 publications

References 19 publications

Geometric Effect on the Nonlinear Force-Displacement Relationship of Awl-Shaped Serpentine Microsprings for In-Plane Deformation

Geometric Effect on the Nonlinear Force-Displacement Relationship of Awl-Shaped Serpentine Microsprings for In-Plane Deformation

Design and Simulation Analysis of A Z Axis Microactuator with Low Mode Cross-Talk

A novel design of compliant forceps with serpentine flexures

Contact Info

Product

Resources

About