Investigation of Hafnium Thin Films for Design of TES Microcalorimeters

Abstract

Hafnium is a metal with rare properties, such as a low superconducting transition temperature slightly above 100 mK, which makes it attractive for a lot of applications, especially for design and fabrication of microcalorimeters with high energy resolution. In this paper we describe the results of fabrication and experimental investigation of superconducting properties of hafnium thin films in a dilution refrigerator. The considered Hf films, whose thickness is in the range from 60 to 115 nm, are deposited on substrates by electron beam evaporation. The combinations with thin layers of normal metals to decrease the critical temperature of superconducting hafnium films by proximity effect, are also considered. The critical temperature of the studied films varies from 56 to 302 mK. Also, significant increase of the critical temperature of some films over time was observed and investigated.