Investigation of Gas Condensation in Pores of Nanoporous Dielectrics in Cryogenic Etching Conditions

Gaidukasov, R. A.; Miakonkikh, A. V.

doi:10.1134/s1063739723600760

Russ Microelectron

2023

DOI: 10.1134/s1063739723600760

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Investigation of Gas Condensation in Pores of Nanoporous Dielectrics in Cryogenic Etching Conditions

R. A. Gaidukasov,

A. V. Miakonkikh

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Investigation of Gas Condensation in Pores of Nanoporous Dielectrics in Cryogenic Etching Conditions

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References 18 publications

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