Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure
Anubhav Paul,
Jila Rafighdoost,
Xiujie Dou
et al.
Abstract:Nanostructures with steep side wall angles (swa) play a pivotal role in various technological applications. Accurate characterization of these nanostructures is crucial for optimizing their performance. In this study, we propose a far-field detection method based on coherent Fourier scatterometry (CFS) for accurate quantification of steep swa and heights in cliff-like nanostructures. Our approach introduces a parameter termed “visibility”, derived from the unique far-field signatures of cliff-like nanostructur… Show more
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