Investigation of air damping effect in two kinds of capacitive MEMS accelerometers

Mo, Yuming; Zhou, Hao; Xie, Guofen; Tang, Bin

doi:10.1007/s00542-017-3598-z

Cited by 2 publications

(5 citation statements)

References 15 publications

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“…For this purpose, four values of damping rate for four capacitive accelerometers were chosen to simulate the developed models given by Equations , , and . Hence, the first value is damping rate of the accelerometer used in practical tests (ζ = 0.6), the second value is damping rate of our proposed accelerometer (ζ = 0.68), the third value is damping rate of proposed accelerometer in the study of Bakhoum (ζ = 0.723), and the fourth value is damping rate of proposed accelerometer in the study of Mo et al (ζ = 0.8). The parameters used for the simulation are the accelerometer natural frequency equal to 1 KHz and the movement relative frequency, which varies between 0 and 320 Hz.…”

Section: Validation By Simulationmentioning

confidence: 83%

“…A capacitive accelerometer should have a uniform sensitivity for a wide bandwidth. Damping is the most important factor affecting the frequency performance of a vibration system . The amplitude‐frequency relationship has a maximum bandwidth for optimal damping, ie, the damping ratio = 0.68 in our design.…”

Section: Capacitive Accelerometer Modelmentioning

confidence: 99%

“…Figure shows the measurement accuracy as a function of relative frequency for four capacitive accelerometers, the first is used in the experimental tests (damping rate = 0.6), the second is the proposed accelerometer (damping rate = 0.68), the third is the proposed accelerometer in the study of Mo et al (damping rate = 0.723), and the fourth is the proposed accelerometer in the study of Bakhoum (damping rate = 0.8).…”

Section: New Expression Of Damping Rate and Improvement Of Capacitivementioning

confidence: 99%

“…Table below shows the parameters of four capacitive accelerometers (accelerometer used in the experimental tests, our proposed accelerometer, proposed accelerometer in the study of Bakhoum, and proposed accelerometer in the study of Mo et al).…”

Section: New Expression Of Damping Rate and Improvement Of Capacitivementioning

confidence: 99%

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Enhancement of capacitive accelerometer operation by parameters improvement

Ghemari

Saad

2019

Int J Numerical Modelling

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In the present paper, a mathematical model suitable for capacitive accelerometer is developed by applying the fundamental principle of dynamics and validated by simulation and experiment test. This model aims to visualize the capacitance variation of the accelerometer as a function of relative movement frequency. The main motivation key role of this paper is to propose a capacitive accelerometer with improved parameters. Therefore, in capacitive detection, the damping rate choice is directly influenced by the variation in capacitance; for this purpose, a comparative study of three damping rates is carried out. The first accelerometer is used in practical tests, the second is presented and studied in recent literature, and the third is the accelerometer proposed in this work. A new expression is extracted from the damping ratio as a function of measurement error to determine the damping rate according to a desired measurement error value. Finally, a new capacitive accelerometer with improved parameters having many advantages over the existing accelerometers is obtained. Simulation and experimental results have enabled us to recommend a new capacitive accelerometer design with very low measurement error (limited to 0.25%), high accuracy (equal to 99.75%), high sensitivity and reliability, and low electrical energy consumption.

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Section: Validation By Simulationmentioning

confidence: 83%

Section: Capacitive Accelerometer Modelmentioning

confidence: 99%

Section: New Expression Of Damping Rate and Improvement Of Capacitivementioning

confidence: 99%

Section: New Expression Of Damping Rate and Improvement Of Capacitivementioning

confidence: 99%

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Enhancement of capacitive accelerometer operation by parameters improvement

Ghemari

Saad

2019

Int J Numerical Modelling

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“…These structures act based on applied voltages induced on electrodes. Examples of such structures include tunable micro capacitors [1,2], micro pumps [3,4], microphones [5], gyroscopes [6,7], accelerometers [8,9], and micro mirrors [10][11][12]. The applied voltage between two electrodes and the changes in its magnitude changes the relative position of the capacitive electrodes and consequently causes to change in capacitance.…”

Section: Introductionmentioning

confidence: 99%

Multi input versus single input sliding mode for closed-loop control of capacitive micro structures

et al. 2019

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Considering the importance of closed-loop control for control of capacitive microstructures and the high capability of the sliding-mode controllers in control of nonlinear systems, the present study has investigated the closed-loop control of these structures using the sliding-mode controller. For this purpose, the sliding-mode controller was designed for single-and double-input cases, and the applied voltages between the capacitive electrodes was considered as the control inputs. The simulation results for both single-and double-input cases have been extracted and presented, and it was concluded that achieving an accurate control for the single input case is not always feasible given that the sign of the sliding surface changes and the control parameter assume positive definite values. Moreover, it has been shown that an accurate control could be achieved by employing the double-input controller without any limitations. The chattering phenomenon was also thoroughly studied in the initial controller design. To eliminate this phenomenon, a smooth variation has been applied to the switching of the sliding surface. In addition to tracking, the capacitive microstructure has been investigated to reduce the relative distance between the two electrodes (in order to increase the capacitive storage), and the obtained results have been presented.

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Investigation of air damping effect in two kinds of capacitive MEMS accelerometers

Cited by 2 publications

References 15 publications

Enhancement of capacitive accelerometer operation by parameters improvement

Enhancement of capacitive accelerometer operation by parameters improvement

Multi input versus single input sliding mode for closed-loop control of capacitive micro structures

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