Investigation of a Step-Like Output Energy Decrease Observed in an ArF Excimer Laser for Microlithography

Sumitani, Akira; Ishihara, Takanobu; Fukuoka, Teruaki; Uchino, Kenji

doi:10.1143/jjap.45.l1030

Cited by 2 publications

(2 citation statements)

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“…Various tests [12][13][14] concerning the steplike energy decrease of the ArF excimer laser confirmed that the energy recovers after a rest time of approximately 0.2 s during burst operation, and that the ratio of the decrease in the energy decreases with increasing gas temperature. Because the absorbing compound F x O y is unstable, its dissociation time and the dependences of its concentration on gas temperature and initial oxygen concentration were investigated.…”

Section: Temporal Variations In Absorption At 193 Nm For Different Ga...mentioning

confidence: 92%

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Elucidation of Steplike Output Energy Decrease Observed in ArF Excimer Laser for Microlithography

Sumitani

Ishihara

Fukuoka

et al. 2007

jjap

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A steplike decrease in the output energy of an ArF excimer laser for microlithography is caused by the laser light absorption in the laser gas. To identify the absorbing gas component, the light absorption characteristics of the laser gas inside the discharge chamber were investigated under various gas conditions using a continuous xenon light source in the ultraviolet region and an ArF excimer laser at 193 nm. As a result, the oxygen-fluorine compound F x O y generated in the laser discharge was identified as the absorbing molecule, because a strong steplike absorption of the 193 nm laser light was only observed when oxygen and fluorine were added together to the discharge gas. The lifetime of this absorbing molecule was examined against gas temperature during the operation of the laser discharge. The data obtained were useful in setting the best operational conditions for the ArF excimer laser for microlithography.

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Section: Temporal Variations In Absorption At 193 Nm For Different Ga...mentioning

confidence: 92%

“…In our previous study 14) involving passive spectroscopic observations, we reported that the steplike decrease in the output energy of the ArF excimer laser is caused by laser light absorption and not by a decrease in laser gain. Also, we revealed that oxygen causes the steplike energy decrease.…”

Section: Introductionmentioning

confidence: 90%