2014
DOI: 10.2971/jeos.2014.14005
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Investigation of a novel silicon-on-insulator Rib-Slot photonic sensor based on the vernier effect and operating at 3.8 µm

Abstract: In this paper, we present the theoretical investigation of photonic sensors based on Vernier effect with two cascade-coupled ring resonators in silicon on insulator technology. The photonic chip utilizes rib and slot waveguides designed to operate at 3.8 µm mid infrared wavelength, where a number of harmful gases, chemical and biochemical analytes are spectroscopically accessible. A rigorous algorithmic procedure has been implemented for the design of such devices and novel technological solutions have been pr… Show more

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Cited by 10 publications
(7 citation statements)
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References 23 publications
(30 reference statements)
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“…The lower the value of this point, the higher is the accuracy. Figures (2)(3)(4) show that new CSM algorithm produce correct values for SO2, CO, and CO2 down to 7.8x10 -6 %, 1.7x10 -6 %, and 2x10 -3 % respectively. Figures (3,4) show that levels of CO2 and CO detected by the new CSM algorithm differ slightly compared to those obtained by the CLS approach.…”
Section: Test Of the Validity Of The New Algorithmmentioning
confidence: 99%
See 2 more Smart Citations
“…The lower the value of this point, the higher is the accuracy. Figures (2)(3)(4) show that new CSM algorithm produce correct values for SO2, CO, and CO2 down to 7.8x10 -6 %, 1.7x10 -6 %, and 2x10 -3 % respectively. Figures (3,4) show that levels of CO2 and CO detected by the new CSM algorithm differ slightly compared to those obtained by the CLS approach.…”
Section: Test Of the Validity Of The New Algorithmmentioning
confidence: 99%
“…Figures (2)(3)(4) show that new CSM algorithm produce correct values for SO2, CO, and CO2 down to 7.8x10 -6 %, 1.7x10 -6 %, and 2x10 -3 % respectively. Figures (3,4) show that levels of CO2 and CO detected by the new CSM algorithm differ slightly compared to those obtained by the CLS approach. The level of CO is slightly underestimated whereas the value of CO2 is slightly overestimated.…”
Section: Test Of the Validity Of The New Algorithmmentioning
confidence: 99%
See 1 more Smart Citation
“…To this purpose, several strategies can be taken into account such as the design and fabrication of two different guiding structures to be used for the isolated and sensible RRs, respectively. For example, a designer can decide to use slot waveguides optimized for homogeneous or surface sensing into the sensible area and conventional strip/rib waveguides for the rest of the chip [ 17 , 36 ]. Similarly, the reference RR of the Vernier device can be based on standard silicon nanowire while the sensing RR based on suspended silicon nanowires with an homogeneous sensitivity even higher than 1, with the variation of the effective index of the propagating optical mode induced by Δ , i.e.…”
Section: Design Strategies and Device Fabricationmentioning
confidence: 99%
“…In this context, a novel silicon-on-insulator rib-slot photonic sensor based on the Vernier effect and operating at the operative wavelength λ op , has been theoretically investigated [ 30 ]. The sensing architecture is assumed to be fabricated on 6-inch SOI wafers with 400 nm-thick silicon layer on 2 μm-thick buried oxide layer, using conventional e-beam lithography and inductively coupled plasma (ICP) etching.…”
Section: Recent Advances In Vernier Effect-based Photonic Sensorsmentioning
confidence: 99%