Investigation of a novel MEMS orthogonal fluxgate sensor fabricated with Co-based amorphous ribbon core

Zhi, Shaotao; Zhang, Feng; Guo, Lei; Lei, Chong; Zhou, Yong

doi:10.1016/j.sna.2017.09.045

Cited by 16 publications

(10 citation statements)

References 24 publications

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“…Therefore, some welldeveloped methods for magnetic¯eld detection have been used in biosensing applications, including (i) magnetoresistive (MR) methods such as anisotropic magnetoresistance (AMR), [46][47][48][49][50][51][52] giant magnetoresistance (GMR), [53][54][55][56][57] tunneling magnetoresistance (TMR), 58,59 giant magnetoimpedance (GMI) [60][61][62][63] and (ii) nonMR methods such as those involving the use of a°ux gate sensor, Hall sensor and superconducting quantum interference device (SQUID). [64][65][66][67][68][69] Several magnetic¯eld sensors have been used in biodiagnostics, but the drawbacks of large size, low sensitivity, or high power consumption limited their use in practical applications. 70 The use of magnetic sensors based on MR e®ects is a promising alternative to overcoming these concerns related to nonMR sensors.…”

Section: Magnetic Sensing Methodsmentioning

confidence: 99%

“…Although researchers have improved the micro°uxgate with various new designs, there is still a physical limitation for the continued miniaturization of the micro°uxgate. [65][66][67] However, it is still employed in biosensing 68 because the device is relatively easy to fabricate. For example, the micro°uxgate sensor is used to trap and detect speci¯c antigens.…”

Section: Magnetic Biosensors Other Than Mr Biosensorsmentioning

confidence: 99%

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Magnetoresistive Biosensors for Direct Detection of Magnetic Nanoparticle Conjugated Biomarkers on a Chip

Huang

Garu

et al. 2019

SPIN

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In this review, we introduce various magnetic biosensors that have been developed. We first explain the advantages of magnetic biosensing and their general operating principles as well as the biolabeling technique for magnetic nanoparticles. Next, we focus on magnetoresistive biosensing technologies because magnetoresistive biosensors will be an essential development direction due to the demand for miniaturization and portable lab-on-a-chip devices. The magnetoresistive effects employed in biosensing include anisotropic magnetoresistance, giant magnetoresistance and tunneling magnetoresistance. In addition to magnetoresistive sensors, the advantages and disadvantages of some nonmagnetoresistive magnetic biosensors are discussed and compared. Finally, we introduce research on integrating magnetic biosensors into the microfluidic laboratory-on-a-chip systems and comment on future development trends.

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Section: Magnetic Sensing Methodsmentioning

confidence: 99%

Section: Magnetic Biosensors Other Than Mr Biosensorsmentioning

confidence: 99%

Magnetoresistive Biosensors for Direct Detection of Magnetic Nanoparticle Conjugated Biomarkers on a Chip

Huang

Garu

et al. 2019

SPIN

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“…The sensor is based on the phenomenon of electromagnetic induction and modulates the measured magnetic field by the transformer effect. Compared with other types of magnetic sensors, fluxgate sensors have advantages such as high resolution (up to 0.1 nT), wide magnetic field measurement range and good stability [ 3 , 4 , 5 , 6 , 7 ].…”

Section: Introductionmentioning

confidence: 99%

Design of a Low-Cost Small-Size Fluxgate Sensor

Shen

Teng

2021

Sensors

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Traditional fluxgate sensors used in geomagnetic field observations are large, costly, power-consuming and often limited in their use. Although the size of the micro-fluxgate sensors has been significantly reduced, their performance, including indicators such as accuracy and signal-to-noise, does not meet observational requirements. To address these problems, a new race-track type probe is designed based on a magnetic core made of a Co-based amorphous ribbon. The size of this single-component probe is only Φ10 mm × 30 mm. The signal processing circuit is also optimized. The whole size of the sensor integrated with probes and data acquisition module is Φ70 mm × 100 mm. Compared with traditional fluxgate and micro-fluxgate sensors, the designed sensor is compact and provides excellent performance equal to traditional fluxgate sensors with good linearity and RMS noise of less than 0.1 nT. From operational tests, the results are in good agreement with those from a standard fluxgate magnetometer. Being more suitable for modern dense deployment of geomagnetic observations, this small-size fluxgate sensor offers promising research applications at lower costs.

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“…In addition, compared with amorphous wire or multiwire cores, the ribbon core is more compatible with micro electro-mechanical system (MEMS) technology. Our previously reported MEMS meander-core orthogonal fluxgate sensor fabricated with Co-based amorphous ribbon exhibited high sensitivity and wide linear range [ 20 ]. The purpose of this paper is to study the demagnetization effect caused by the variations of the number of strips, the line width, and the spacing of the meander-cores, and further investigate the influence of the demagnetization factor on the sensitivity and linear range of the meander-core orthogonal fluxgate sensor in fundamental mode.…”

Section: Introductionmentioning

confidence: 99%

Demagnetization Effect in a Meander-Core Orthogonal Fluxgate Sensor

et al. 2021

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Demagnetization effect plays an important role in the magnetic core design of the orthogonal fluxgate sensor. In this paper, a meander-core orthogonal fluxgate sensor based on amorphous ribbon is described. The demagnetization model of meander-core structures is established, and the average demagnetization factor can be evaluated by finite element modeling. Simulation and experimental analyses were performed to study the effects of demagnetization on the sensitivity and linear range of orthogonal fluxgate sensors in the fundamental mode by varying the number of strips, the line width, and the spacing of the meander-cores. The results were compared and revealed a very close match. The results show that the demagnetization factor increases with an increase in the number of strips and the line width, which leads to an increase in the linear range of the sensors. The sensitivity can be improved by increasing the number of strips appropriately, however, it is reduced when the line width increases. Smaller spacing results in a larger demagnetization factor due to the magnetic interactions between adjacent strips, which reduces the sensitivity of the sensor. The results obtained here from simulations and experiments are useful for designing magnetic sensors with similar structures.

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Investigation of a novel MEMS orthogonal fluxgate sensor fabricated with Co-based amorphous ribbon core

Cited by 16 publications

References 24 publications

Magnetoresistive Biosensors for Direct Detection of Magnetic Nanoparticle Conjugated Biomarkers on a Chip

Magnetoresistive Biosensors for Direct Detection of Magnetic Nanoparticle Conjugated Biomarkers on a Chip

Design of a Low-Cost Small-Size Fluxgate Sensor

Demagnetization Effect in a Meander-Core Orthogonal Fluxgate Sensor

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