Investigation of a 1-DOF piezoelectric micro-positioning rotary stage

Grybas, I.; Bubulis, A.; Jurenas, Vytautas; Ragulskis, K.; Eidukynas, Valdas; Janutienė, Rasa Kandrotaitė; Ragulskis, L.

doi:10.1016/j.precisioneng.2018.10.004

Cited by 7 publications

(3 citation statements)

References 12 publications

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“…4(a), with XY outputs obtained with a driving torque of 3.6 μN•m and motion speed of 21.8 rps. Grybas et al [47] proposed a 1-DOF piezoelectric micro-positioning rotary stage, as illustrated in Fig. 4(b).…”

Section: Aerospace Engineeringmentioning

confidence: 99%

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A Review of Application and Development Trends in Ultrasonic Motors

Li¹,

Wen²,

Jia³

et al. 2020

ES Mater. Manuf.

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The structure and performance of ultrasonic motors have gradually improved with the emergence of new materials, techniques, and structural forms. Therefore, the application scope of this technology is also expanding, especially in the field of high-end equipment. This paper conducts a review of research on the application status and progress at the frontier of research on ultrasonic motors. A summary and classification of both the status of application and cutting-edge research progress are presented, including the use of ultrasonic motors in aerospace, precision, biomedical and optical engineering and the influence on ultrasonic motor design resulting from the breakthrough in advanced processing and preparation technology, structural and functional integration technology, low voltage drives and open-loop control systems. Moreover, the performance of products developed with the aid of ultrasonic motors and representative devices are compared; and state of the art ultrasonic motor designs are discussed and summarized. Finally, potential future research efforts and prospects are highlighted.

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Section: Aerospace Engineeringmentioning

confidence: 99%

“…(b) structure of the micro-positioning rotary stage [47]; (c) structure of the proposed actuator [48].…”

Section: Aerospace Engineeringmentioning

confidence: 99%

A Review of Application and Development Trends in Ultrasonic Motors

Li¹,

Wen²,

Jia³

et al. 2020

ES Mater. Manuf.

View full text Add to dashboard Cite

show abstract

“…Piezoelectric actuators (PAs) are widely used in micro/nano-displacement precision mechanism such as micro/nanoscale machining, 1 microelectro mechanical system, 2,3 precision positioning, 4,5 active vibration suppression, 6,7 etc. because of its characteristics of small volume, quick to respond, high resolution, strong driving force, a fairly wide working bandwidth.…”

Section: Introductionmentioning

confidence: 99%

Hysteresis modeling of piezoelectric actuators with the frequency-dependent behavior using a hybrid model

Qian

Ouyang

Song

et al. 2019

Proceedings of the Institution of Mechanical Engineers, Part C:

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In order to overcome the problem of positioning inaccuracy caused by nonlinear hysteresis of piezoelectric actuators, a hybrid model based on least-squares support vector machine and Bouc–Wen model is proposed to model the rate-dependent hysteresis of piezoelectric actuators. A rate-independent Bouc–Wen model and its parameters identification method is established as the basis of least-squares Bouc–Wen model. Least-squares support vector machine, which is optimized by particle swarm optimization, is introduced to improve the Bouc–Wen model into a rate-dependent model by adjusting parameters of Bouc–Wen dynamically. Experiment is carried out to validate both Bouc–Wen model and the proposed least-squares Bouc–Wen model. The results show that the proposed least-squares Bouc–Wen method is a valid and a more precise method compared to the rate-independent Bouc–Wen model.

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Modeling, analysis and suppression of current harmonics of Langevin-type ultrasonic motors under high voltage

Yao

et al. 2020

Precision Engineering

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Investigation of a 1-DOF piezoelectric micro-positioning rotary stage

Cited by 7 publications

References 12 publications

A Review of Application and Development Trends in Ultrasonic Motors

A Review of Application and Development Trends in Ultrasonic Motors

Hysteresis modeling of piezoelectric actuators with the frequency-dependent behavior using a hybrid model

Modeling, analysis and suppression of current harmonics of Langevin-type ultrasonic motors under high voltage

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