Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates

Mechanism and Effect of the Dilution Gas Flow Rate on Various Fe–Si/SiO2 Soft Magnetic Composites during Fluidised Bed Chemical Vapour Deposition

“…The inorganic oxide-insulating layers are deposited on the particle surface by thermally decomposing the precursors [12][13][14]. However, during the subsequent particle-moulding process, the inorganic oxide-insulating layers easily break and collapse because of the large lattice mismatch and thermal expansion coefficient mismatch between inorganic oxides and particle substrates [15,16], which may negatively impact performance.…”

Enhanced Secondary Battery Anodes Based on Si and Fe3O4 Nanoparticle Infilled Monodisperse Carbon Starburst Colloidal Crystals

“…To explore the generality of the concept of using the MSCS as an active material host, and because of the observed capacity fade issues with the Si‐MSCS system, an Fe 3 O 4 ‐based MSCS anode was investigated. While sCVD has been widely used for the conformal deposition of Si, Fe has generally been grown using a traditional CVD flow reactor and rough and/or discontinuous films are often formed . We recently demonstrated the sCVD of conformal, continuous Fe films using Fe(CO) 5 as the precursor .…”