Investigation into the effects of deposition parameters on TiO2 photocatalyst thin films by rf magnetron sputtering

Chen, C.C.; Yang, W.J.; Hsu, Chun-Yao

doi:10.1016/j.spmi.2009.05.007

Cited by 29 publications

(20 citation statements)

References 23 publications

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“…The optimal deposition parameters can be obtained by analyzing the experimental results of various experimental permutations using orthogonal arrays, a statistical analysis of the signal-to-noise (S/N) ratio and an analysis of variance (ANOVA) [13]. The effects of deposition parameters on TiO 2 photocatalyst thin films by rf magnetron sputtering could be analyzed using the Taguchi method (Chen et al [14]). Cheng et al identified an uniform anatase form of TiO 2 photocatalyst prepared using a modified chemical vapor deposition method under the optimal conditions, using the Taguchi method [15].…”

Section: Introductionmentioning

confidence: 99%

Properties of TiO2 films deposited on flexible substrates using direct current magnetron sputtering and using high power impulse magnetron sputtering

Twu

Chiou

et al. 2015

Polymer Degradation and Stability

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Section: Introductionmentioning

confidence: 99%

Properties of TiO2 films deposited on flexible substrates using direct current magnetron sputtering and using high power impulse magnetron sputtering

Twu

Chiou

et al. 2015

Polymer Degradation and Stability

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“…The RF magnetron sputtering process provides reliable and accurate thin-film deposition 13,14 . In Figure 5 is shown the deposition scheme.…”

Section: Fabricationmentioning

confidence: 99%

A blue optical filter for narrow-band imaging in endoscopic capsules

Silva

Ghaderi

Gonçalves

et al. 2014

Biophotonics: Photonic Solutions for Better Health Care IV

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This paper presents the design, simulation, fabrication, and characterization of a thin-film Fabry-Perot resonator composed of titanium dioxide (TiO 2 ) and silicon dioxide (SiO 2 ) thin-films. The optical filter is developed to be integrated with a light emitting diode (LED) for enabling narrow-band imaging (NBI) in endoscopy. The NBI is a high resolution imaging technique that uses spectrally centered blue light (415 nm) and green light (540 nm) to illuminate the target tissue. The light at 415 nm enhances the imaging of superficial veins due to their hemoglobin absorption, while the light at 540 nm penetrates deeper into the mucosa, thus enhances the sub-epithelial vessels imaging. Typically the endoscopes and endoscopic capsules use white light for acquiring images of the gastrointestinal (GI) tract. However, implementing the NBI technique in endoscopic capsules enhances their capabilities for the clinical applications. A commercially available blue LED with a maximum peak intensity at 404 nm and Full Width Half Maximum (FWHM) of 20 nm is integrated with a narrow band blue filter as the NBI light source. The thin film simulations show a maximum spectral transmittance of 36 %, that is centered at 415 nm with FWHM of 13 nm for combined the blue LED and a Fabry Perot resonator system. A custom made deposition scheme was developed for the fabrication of the blue optical filter by RF sputtering. RF powered reactive sputtering at 200 W with the gas flows of argon and oxygen that are controlled for a 5:1 ratio gives the optimum optical conditions for TiO 2 thin films. For SiO 2 thin films, a non-reactive RF sputtering at 150 W with argon gas flow at 15 sccm results in the best optical performance. The TiO 2 and SiO 2 thin films were fully characterized by an ellipsometer in the wavelength range between 250 nm to 1600 nm. Finally, the optical performance of the blue optical filter is measured and presented.

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“…This technique required several carefully controlled steps, including heat treatment [12]. Taking into account the fact that the RMS of the initial Parylene layer was 15 nm, the thickness uniformity of the optimized ultrasound-assisted deposition of the anatase TiO 2 film (sample D) can also be compared with the titania film with a RMS of 6 nm [24]. This 6 nm roughness is produced Table 1.…”

Section: Surface Properties and Morphologymentioning

confidence: 99%

“…This 6 nm roughness is produced Table 1. on the glass substrate at 250-450°C by radio frequency magnetron sputtering method, which is based on the rather sophisticated equipment [24].…”

Section: Surface Properties and Morphologymentioning

confidence: 99%

Modification of Parylene film-coated glass with TiO2 nanoparticles and its photocatalytic properties

Perkas

Amirian

Girshevitz

et al. 2011

Surface and Coatings Technology

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Investigation into the effects of deposition parameters on TiO2 photocatalyst thin films by rf magnetron sputtering

Cited by 29 publications

References 23 publications

Properties of TiO2 films deposited on flexible substrates using direct current magnetron sputtering and using high power impulse magnetron sputtering

Properties of TiO2 films deposited on flexible substrates using direct current magnetron sputtering and using high power impulse magnetron sputtering

A blue optical filter for narrow-band imaging in endoscopic capsules

Modification of Parylene film-coated glass with TiO2 nanoparticles and its photocatalytic properties

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