Investigation into layers formed by selective transfer CMP mechanisms with atomic force microscope

Ilie, Filip

doi:10.1007/s11051-011-0540-7

Cited by 9 publications

(6 citation statements)

References 11 publications

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“…In literature, 1–5 it was shown that for this type of frictional couple, the servowitte film on the friction surfaces is formed as a result of decomposition of the copper melt (which is a solid solution). At lower temperatures, the technical glycerin facilitates the deformation through shear (displacement) in the diffusion process.…”

Section: Forming Mechanism Of the Selective Layer (Servowitte)mentioning

confidence: 99%

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Rheological behavior of the lubricants favoring the formation of thin layers by selective transfer in the frictional couples

Ilie

2018

Proceedings of the Institution of Mechanical Engineers, Part J:

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During the friction process of certain materials and in the presence of some adequate lubricants (technical glycerin), the wear phenomenon manifests as a material transfer from an element of a frictional couple on the other, in the contact areas (forming a selective layer), and therefore, can function in conditions of selective transfer. This phenomenon lasts until it reaches an optimal thickness, and after that, the transferred layer may return totally or partially to the initial element. In the contact points of the frictional couples that function with the selective transfer, several physical–chemical processes take place that favor the phenomenon. An important role in the functioning of the frictional couples with a selective transfer is rheological behavior that it has the lubricant. This paper analyzes the behavior and some of the rheological properties of the technical glycerin in the frictional couples what functioning with the selective transfer, technical glycerin being the lubricant that contributes sure, to the triggering of this phenomenon.

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Section: Forming Mechanism Of the Selective Layer (Servowitte)mentioning

confidence: 99%

“…Therefore, in this paper a model lubricant (technical glycerin) was used that is better than other lubricants, with regard to the regime of the selective transfer, in the presence of a couple of suitable materials (bronze/steel). 2,3 So, it became interesting to research the rheological properties of technical glycerin.…”

Section: Introductionmentioning

confidence: 99%

Rheological behavior of the lubricants favoring the formation of thin layers by selective transfer in the frictional couples

Ilie

2018

Proceedings of the Institution of Mechanical Engineers, Part J:

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“…Qin et al [14] showed that the difference in load on non-uniform particles in an abrasive particle environment is the cause of seal workpiece failure. But there is less research on the tribology mechanism of single abrasive wear at the micro-scale [15][16][17][18][19], which hinders the research progress of the abrasive size effect on friction behavior and the abrasive mechanical properties insufficient. The influence of abrasives size on the abrasive friction behavior and mechanical properties have attracted broad research interests [6,15,32].…”

Section: Introductionmentioning

confidence: 99%

Size Effect of CeO2 Particle on Nanoscale Single-Asperity Sliding Friction

Liu

et al. 2021

Tribol Lett

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The size of abrasive particle has a great impact on the fundamental friction behavior and mechanical properties of the abrasive during ultra-precision polishing performance. Here, the size effect of the tribological behavior and mechanical properties of CeO 2 single abrasive were studied. Experimental results show that the size effect plays a role on coefficient of friction (COF) of each regime in single-asperity sliding friction, especially in ploughing and cutting regimes. The residual depth of the scratch and COF both decrease with the increase of the CeO 2 tip radius. These results relate to the mechanical properties of CeO 2 nanoparticles. We found that the effective modulus increases with the decrease of abrasive size, which corresponds to the size effect of the single-asperity sliding friction experiment.

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“…It is clear that the abrasive size has a signi cant in uence on the predominant wear mechanisms, but there is no consensus on the effect of abrasives size on the wear process and mechanical properties of abrasive particles, especially at the micro-nano scale. Up to now, only a few researchers had been performed on the tribology mechanism of single abrasive wear at the micro-scale [15][16][17][18][19], which hinders the research progress of the abrasive size effect on friction behavior and the abrasive mechanical properties insu cient. The in uence of abrasives size on the abrasive friction behavior and mechanical properties have attracted broad research interests [6,7,15].…”

Section: Introductionmentioning

confidence: 99%

Size Effect of CeO2 Particle On Nanoscale Single-Asperity Sliding Friction

Liu

et al. 2021

Preprint

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The size of abrasive particle has a great impact on the fundamental friction behavior and mechanical properties of the abrasive during ultra-precision polishing performance. Here, the size effect of the tribological behavior and mechanical properties of CeO2 single abrasive were studied. Experimental results show that the size effect plays a role on coefficient of friction (COF) of each regime in single-asperity sliding friction, especially in ploughing and cutting regimes. The residual depth of the scratch and COF both decrease with the increase of the CeO2 tip radius. These results relate to the mechanical properties of CeO2 nanoparticles. We found that the effective modulus increases with the decrease of abrasive size, which corresponds to the size effect of the single-asperity sliding friction experiment.

show abstract

Investigation into layers formed by selective transfer CMP mechanisms with atomic force microscope

Cited by 9 publications

References 11 publications

Rheological behavior of the lubricants favoring the formation of thin layers by selective transfer in the frictional couples

Rheological behavior of the lubricants favoring the formation of thin layers by selective transfer in the frictional couples

Size Effect of CeO2 Particle on Nanoscale Single-Asperity Sliding Friction

Size Effect of CeO2 Particle On Nanoscale Single-Asperity Sliding Friction

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