Investigation About Stepwise Excitation Cross Sections in Rare Gases

Behnke, J. F.; Deutsch, Hans‐Peter; Scheibner, H.

doi:10.1002/ctpp.19850250106

Cited by 14 publications

(9 citation statements)

References 12 publications

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“…The measured electron concentrations are somewhat smaller than calculated ones, the measured field strengths are higher than the calculated values. The dependence of electrical field on HMDS admixture shows that in agreement with other experimental 15 . and HMDS-admixture X ( j = 4 .…”

Section: Resultssupporting

confidence: 91%

“…The rate coefficients for the reactions in the positive column in pure argon were deterT mined by solving the balance equations (l), (2) with X = 0 taking into account the calculated values x, 0, 0 measured values [15] simplified reaction schema shown in Tab. 1.…”

Section: Particle Balance Equationsmentioning

confidence: 99%

“…1. By variation of rate coefficients the calculated electric field, the electron and metastable densities were fitted to experimental results of BEHNKE [15] (Fig. 1).…”

mentioning

confidence: 99%

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Modelling of the Positive Column in an Argon‐Hexamethyl‐disiloxane dc Glow Discharge

Schmidt¹,

Maass²

1989

Contrib. Plasma Phys.

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A model is presented of the positive column of a dc glow discharge in argon with small admixtures of hexamethyldisiloxane (HMDS). The axial electric field, the ion production rates for direct-, stepwise-, pair-, and Penning ionization, the densities of metastable Ar atoms and of electrons, and the wall current of HMDS ions are calculated in dependence on HMDS admixture and discharge current density. For the calculations particle balance equations were used for a diffusion determined plasma in a mixture of two gaseous components. The reaction rates for the electron collision processes were determined applying the electron distribution function calculated for pure argon. Taking into account PENNING ionization of HMDS molecules by metastable argon atoms the decrease of electric field for increasing HMDS admixtures is according to the experimentally measured values. Also ion wall currents and electron densities are compared with experimental values for thin film formation rate and results of probe measurements.

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Section: Resultssupporting

confidence: 91%

Section: Particle Balance Equationsmentioning

confidence: 99%

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Modelling of the Positive Column in an Argon‐Hexamethyl‐disiloxane dc Glow Discharge

Schmidt¹,

Maass²

1989

Contrib. Plasma Phys.

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“…This An attempt of a more detailed description requires the consideration of the insignificant increase of the electron temperature in Fig.4. In this case the energy-dependent excitation cross sections were calculated by the semiempirical formula given in [15]:…”

Section: Ikmentioning

confidence: 99%

Density Distribution of Plasma Species in a Hollow Cathode Arc Discharge for Coating Application

Mönke

Scheibner

Mechold

et al. 1996

Contrib. Plasma Phys.

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The plasma of a hollow cathode arc discharge (argon/titanium) was studied by emission spectroscopy and probe measurements. The behavior of the relative particle concentrations of the different heavy plasma components as well as the concentration and temperature of the electrons was determined as function of the vertical distance from the anode crucible.Abel-inverted radial distributions of the relative level populations for Ti Z (neutral titanium), Ti IZ (singly ionized titanium), Ar Z and AT ZZ are presented. Further measurements characterize the influence of the discharge current on the relative level population.

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“…The often quoted Born cross sections calculated by Hyman (1978) have been used in our calculations together with the FOMBT results of . As an example of a large number of semi-empirical formulae we included the formula due to Behnke et al (1985) with parameters obtained from fits to the experimental data for emission from argon discharges. A comparison of the cross sections with the measurements of Mityureva (1985) is inconclusive.…”

Section: (3a) Calculation Of the Electron Energy Distribution Functiomentioning

confidence: 99%

Influence of Excited Molecules on Electron Swarm Transport Coefficients and Gas Discharge Kinetics

Petrović¹,

Jovanovic²,

Raspopović³

et al. 1997

Aust. J. Phys.

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In this paper we study different effects of excited molecules on swarm parameters, electron energy distribution functions and gas discharge modeling. First we discuss a possible experiment in parahydrogen to resolve the discrepancy in hydrogen vibrational excitation cross section data. Negative differential conductivity (NDC) is a kinetic phenomenon which manifests itself in a particular dependence of the drift velocity on E/N and it is affected by superelastic collisions with excited states. A complete kinetic scheme for argon required to model excited state densities in gas discharges is also described. These results are used to explain experiments in capacitively and inductively coupled RF plasmas used for processing. The paper illustrates the application of atomic and molecular collision data, swarm data and the theoretical techniques in modeling of gas discharges with large abundances of excited molecules. It is pointed out that swarm experiments with excited molecules are lacking and that there is a shortage of reliable data, while the numerical procedures are sufficiently developed to include all the important effects.

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Investigation About Stepwise Excitation Cross Sections in Rare Gases

Cited by 14 publications

References 12 publications

Modelling of the Positive Column in an Argon‐Hexamethyl‐disiloxane dc Glow Discharge

Modelling of the Positive Column in an Argon‐Hexamethyl‐disiloxane dc Glow Discharge

Density Distribution of Plasma Species in a Hollow Cathode Arc Discharge for Coating Application

Influence of Excited Molecules on Electron Swarm Transport Coefficients and Gas Discharge Kinetics

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