1997
DOI: 10.1088/0022-3727/30/23/001
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Investigating the thermodynamics and kinetics of thin film reactions by differential scanning calorimetry

Abstract: In this paper we demonstrate the utility of differential scanning calorimetry for investigating the thermodynamics and kinetics of a broad range of thin film reactions. We begin by describing differential scanning calorimeters and the preparation of thin film samples. We then cite a number of examples that illustrate how enthalpies of crystallization, heats of formation and enthalpies of interfaces can be measured using layered thin films of Ni/Al, Cu/Zr and Zr/Al and homogeneous thin films of Co-Si, Nb-Cu, Cr… Show more

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Cited by 177 publications
(138 citation statements)
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“…The samples were stored at room temperature for several weeks, and subsequently aged at 170°C for 2, 7 or 21 days. All DSC experiments were conducted in a Perkin Elmer Pyris 1 Calorimeter, which is a power compensation DSC [1,21]. Nitrogen was used as both a purge and protective gas.…”
Section: Methodsmentioning
confidence: 99%
“…The samples were stored at room temperature for several weeks, and subsequently aged at 170°C for 2, 7 or 21 days. All DSC experiments were conducted in a Perkin Elmer Pyris 1 Calorimeter, which is a power compensation DSC [1,21]. Nitrogen was used as both a purge and protective gas.…”
Section: Methodsmentioning
confidence: 99%
“…This necessitated that the film be removed from the Si substrate. 20 This was accomplished by coating the Si wafers with a polymer release layer prior to deposition. Most of the film was mechanically peeled away from the polymer, while the remaining film was removed by dissolving the polymer layer away in acetone.…”
Section: Methodsmentioning
confidence: 99%
“…The energy is quantified by comparison to an unreactive reference, and the system can be operated in isochronal ͑constant heating rate͒ or isothermal mode. 20 The time-temperature relationship in an isochronal experiment is given by Eq. ͑1͒:…”
Section: Differential Scanning Calorimetrymentioning
confidence: 99%
See 1 more Smart Citation
“…16 Differential scanning calorimetry ͑DSC͒, combined with other techniques such as transmission electron microscopy ͑TEM͒ and x-ray diffraction ͑XRD͒, can offer both quantitative and qualitative information for the phase transformation in thin films. 20,21 In this study, the phase transformation in PdMn and PdPtMn films was investigated using DSC, XRD, and TEM. The difference in the transformation temperature for PdMn and PdPtMn thin films is discussed.…”
Section: Introductionmentioning
confidence: 99%