Investigating the structural and physical properties of hydrogenated amorphous carbon films fabricated by middle frequency pulsed unbalanced magnetron sputtering

Investigation of working pressure on the surface roughness controlling technology of glow discharge polymer films based on the diagnosed plasma

“…Glow discharge polymer (GDP) films, which are fabricated by plasma polymerization, belong to amorphous hydrogenated carbon (a-C:H) materials. In the past few decades, GDP films have gained comprehensive attention because of their excellent properties, such as low atomic number, high mechanical rigidity, high optical transparency, good thermal stability, and chemical inertness, etc [1,2]. These properties result in their widely spread application as a protective coating in many fields.…”

“…These properties result in their widely spread application as a protective coating in many fields. Further, GDP films are currently used as the preferred ablator material for inertial confinement fusion (ICF) experiments [2]. During the fabrication of ICF targets, the thickness and surface roughness of GDP films must be precisely controlled to optimize the physical properties of targets, such as hydrodynamic instabilities etc, which greatly affect the ignition experiments [2,3].…”

“…Further, GDP films are currently used as the preferred ablator material for inertial confinement fusion (ICF) experiments [2]. During the fabrication of ICF targets, the thickness and surface roughness of GDP films must be precisely controlled to optimize the physical properties of targets, such as hydrodynamic instabilities etc, which greatly affect the ignition experiments [2,3]. To achieve the requirement of ICF experiments, the surface roughness of GDP films, which are fabricated by plasma enhanced chemical vapor deposition technology, must be controlled below 20 nm [4].…”

Infuence of Nitrogen Gas Flow Rate on Nitrogenated Amorphous Carbon Film for Solar Cell Applications

“…The highest conductivity is found at sample 200 mL/min while the lowest conductivity is at 0 mL/min. Some investigators reported the electrical conductivity increases with the increase of the nitrogen content [7][8][9] but others reported in contrarily [8,9]. The increasing of conductivity might be caused by the conversion of primary doping configuration in film from σ-doping (at low N content) to π-doping (at higher N content) as reported mainly in tetrahedral net [8,9] i.e.…”

“…It is a non-doping configuration, since it gives a filled valence band. The second factor is β-C3N4 and α-CNx phases appear in heavily doped diamond like carbon film as the form of some small nonconductive crystal particles [7][8][9]. 2 with a scan rate 1Hz and scan size of 10µm.…”