Investigating the mechanism of enhancing interfacial adhesion of SiOx films on GaAs substrates through process optimization

He, Zhiwei; Gao, Jiuru; Liu, Chanjuan; Li, Zichao; Xu, Kaidong; Zhuang, Shiwei

doi:10.1016/j.tsf.2024.140530

Thin Solid Films

2024

DOI: 10.1016/j.tsf.2024.140530

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Investigating the mechanism of enhancing interfacial adhesion of SiOx films on GaAs substrates through process optimization

Zhiwei He,

Jiuru Gao,

Chanjuan Liu

et al.

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Investigating the mechanism of enhancing interfacial adhesion of SiOx films on GaAs substrates through process optimization

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References 32 publications

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