Investigating the Impact of Substrate Defects on the Operational Performance of a Silicon-Substrate Bimorph Piezoelectric Energy Harvester
Asghar Jamshiddoust,
Morteza Karamooz,
Amin Farrokhabadi
Abstract:Cracks are prevalent defects found in micro-electromechanical systems, influencing both the operational dynamics and performance of these structures. These cracks have the potential to alter the stiffness of the structure and impact various parameters such as resonance frequency, voltage, and output power. This transformation may eventually result in structural failure over a defined period. Hence, it is imperative to diagnose and detect structural cracks. In this study, we introduce a semi-analytical method t… Show more
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