The role played by oxygen vacancies
and rare earth (RE) elements
in the anatase-to-rutile (A–R) phase transformation of titanium
dioxide (TiO2) is still a matter of controversy. Here,
we report the A–R transformation of TiO2 thin solid
films as obtained by ion beam sputtering a RE-decorated titanium target
in an oxygen-rich atmosphere. The samples correspond to undoped, single-doped
(Sm, Tm, and Tb), and codoped (Sm:Tb, Sm:Tm, and Sm:Tb:Tm) TiO2 films. In the as-prepared form, the films are amorphous and
contain ∼0.5 at. % of each RE. The structural modifications
of the TiO2 films due to the RE elements and the annealing
treatments in an oxygen atmosphere are described according to the
experimental results provided by Raman scattering, X-ray photoelectron
spectroscopy, and optical measurements. The A–R transformation
depends on both the annealing temperature and the characteristics
of the undoped, single-doped, and codoped TiO2 films. As
reported in the literature, the A–R transformation can be inhibited
or enhanced by the presence of impurities and is mostly related to
energetic contributions. The experimental results were analyzed, considering
the essential and stabilizing role of the entropy of mixing in the
A–R transformation due to the introduction of more and multiple
quantum states originated in vacancies and impurities in the anatase
phase.