2015
DOI: 10.1088/0022-3727/49/6/065004
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Investigating the complex mechanism of B migration in a magnetic-tunnel-junction trilayer structure—a combined study using XPS and TOF-SIMS

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“…In most of the MRAM research, the spin-torque structure consists of two CoFeB layers separated by a very thin MgO insulator layer [1]. Upon annealing, one important issue is that B diffuses to the insulating layer and causes a magnetic dead layer, which degrades the performance of MRAM [2][3][4]. Thus, to avoid this issue, an additional capping layer, such as Ta or Zr acted as B absorber can be put next to the CoFeB layers.…”
mentioning
confidence: 99%
“…In most of the MRAM research, the spin-torque structure consists of two CoFeB layers separated by a very thin MgO insulator layer [1]. Upon annealing, one important issue is that B diffuses to the insulating layer and causes a magnetic dead layer, which degrades the performance of MRAM [2][3][4]. Thus, to avoid this issue, an additional capping layer, such as Ta or Zr acted as B absorber can be put next to the CoFeB layers.…”
mentioning
confidence: 99%