Investigate the heat conduction between film and substrate during sputtering process by multi-layer structure NiCr/NiSi film thermocouples

Liu, Zhihui; Wang, Qizhen; Zhang, Xin; Xing, Bo; Yang, Yongrong; Wang, Hualin; Jiang, Weiwei; Cui, Yunxian; Ding, Wanyu

doi:10.1016/j.jallcom.2023.169020

Cited by 3 publications

(9 citation statements)

References 29 publications

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“…The detailed discussion about EDS and XPS results could be seen in our previous reports. [ 35–37 ] Based on Figure 3e, the bulk carrier mobility ( µ ), bulk resistivity ( ρ ), bulk carrier concentration ( n ) of NiSi and NiCr films correspond well with the standard data of K type thermocouple respectively, which are measured by Hall effect system. [ 33,34 ] Then, all NiCr/NiSi TFTCs are calibrated with the accurate static calibration procedure, which has been discussed in our previous reports.…”

Section: Resultssupporting

confidence: 60%

“…of NiCr/NiSi TFTCs is obtained, accurately. [35][36][37] Then, NiCr/NiSi TFTCs are also dynamically calibrated by the home-made system, just as shown in Figure 15. In homemade dynamic calibration system, NiCr/NiSi TFTCs were fixed and faced to Quantel ultra 50 short pulse infrared laser system.…”

Section: Methodsmentioning

confidence: 99%

“…[33,34] Then, all NiCr/NiSi TFTCs are calibrated with the accurate static calibration procedure, which has been discussed in our previous reports. [35][36][37] Because of the difference between n and sheet carrier concentration Coef . of NiCr/NiSi TFTCs could be seen in our previous reports.…”

Section: Basic Properties Of Nicr/nisi Tftcsmentioning

confidence: 99%

“…of NiCr/NiSi TFTCs could be seen in our previous reports. [35][36][37] Besides, the uniformity of Ni and Cr in NiCr film, as well as Ni and Si in NiSi film, are also important, which could influence the characters of NiCr/NiSi TFTCs. So, EDS mapping is also carried out onto TFTCs, it has little influence onto the dynamic calibration results in Figures 1 and 2, especially for the violent oscillation in t 3 stage.…”

Section: Basic Properties Of Nicr/nisi Tftcsmentioning

confidence: 99%

“…of standard K type wire-type thermocouple. [35][36][37] In case of NiCr/NiSi TFTCs used in this work, S Static Coef . is only about (9.68 ± 0.77) μV K −1 , which is much lower than that of standard K type NiCr/NiSi wire thermocouple (42.04 μV K −1 ).…”

Section: Tef Signals Of Nicr/nisi Tftcsmentioning

confidence: 99%

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Preliminary Investigation of Thermoelectric Electromotive Force Oscillation of NiCr/NiSi Thin Film Thermocouple in Dynamic Calibration

Sun,

Liu,

Hao

et al. 2023

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In order to reveal the dynamic response characteristic of thin film thermocouples (TFTCs), the nichrome/nisil (NiCr/NiSi) TFTCs are prepared onto the glass substrate. With short pulse infrared laser system, NiCr/NiSi TFTCs are dynamically calibrated. The thermoelectric electromotive force (TEF) curves of NiCr/NiSi TFTCs are recorded by the memory hicorder system, which could reflect TEF signals with resolution ratio in nanosecond and microvolt, simultaneously. With increasing laser energy from 15.49 to 29.59 mJ, TEF curves display more and more violent oscillation, even negative value. The results show that the bounce of thermal energy happens between two interfaces of TFTCs because the thermal conductivity of glass and air is significantly lower than that of NiSi/NiCr TFTCs. The bounce of thermal energy results in the obvious decrease of nNiCr and nNiSi, as well as oscillation of TEF. For laser energy in 29.59 mJ, the bounce of thermal energy in NiCr film could result in nNiCr < nNiSi. Then, TEF value appears abnormal negative value. Based on the results, the complex thermal energy transport process in TFTCs dynamic calibration is revealed, which results in the oscillation of thermal energy and TEF signal.

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Section: Resultssupporting

confidence: 60%

Section: Methodsmentioning

confidence: 99%

Section: Basic Properties Of Nicr/nisi Tftcsmentioning

confidence: 99%

Section: Basic Properties Of Nicr/nisi Tftcsmentioning

confidence: 99%

Section: Tef Signals Of Nicr/nisi Tftcsmentioning

confidence: 99%

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Preliminary Investigation of Thermoelectric Electromotive Force Oscillation of NiCr/NiSi Thin Film Thermocouple in Dynamic Calibration

Sun,

Liu,

Hao

et al. 2023

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Nanosecond-level second-order characteristics in dynamic calibration of thin film thermocouples by short-pulse laser

Wang,

Cui,

Mingfeng

et al. 2024

Measurement

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Sandwich probe temperature sensor based on In₂O₃-IZO thin film for ultra-high temperatures

Fan,

Tian,

Shi

et al. 2024

Int. J. Extrem. Manuf.

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High-temperature thin-film thermocouples (TFTCs) have garnered significant attention in aerospace and steel metallurgy industries. However, previous studies on TFTCs have primarily focused on the two-dimensional planar type, whose thermal sensitive area has to be perpendicular to the test environment, and therefore affects the thermal fluids pattern or loses the accuracy. In order to address this problem, recent studies have developed the three-dimensional probe-type TFTCs, which can be set parallelly to the test environment. Nevertheless, the probe-type TFTCs are limited by their measurement threshold and poor stability at high-temperature. To address these issues, in this study, we propose a novel probe-type TFTCs temperature sensor with a sandwich structure. The sensitive layer is compounded with indium oxide (In2O3) doped zinc oxide (ZnO) and fabricated using screen-printing technology. With the protection of sandwich structure on electrode film, the sensor demonstrates robust high-temperature stability, enabling continuous working at 1200 °C above 5 hours with a low drift rate of 2.3 °C/h. This sensor exhibits a high repeatability of 99.3% when measures the low to high temperatures, which is beyond the most existing probe-type TFTCs reported in the literature. With its excellent high-temperature performance, this temperature sensor holds immense potential for enhancing equipment safety in the aerospace engineering and ensuring product quality in steel metallurgy industries.

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Investigate the heat conduction between film and substrate during sputtering process by multi-layer structure NiCr/NiSi film thermocouples

Cited by 3 publications

References 29 publications

Preliminary Investigation of Thermoelectric Electromotive Force Oscillation of NiCr/NiSi Thin Film Thermocouple in Dynamic Calibration

Preliminary Investigation of Thermoelectric Electromotive Force Oscillation of NiCr/NiSi Thin Film Thermocouple in Dynamic Calibration

Nanosecond-level second-order characteristics in dynamic calibration of thin film thermocouples by short-pulse laser

Sandwich probe temperature sensor based on In₂O₃-IZO thin film for ultra-high temperatures

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Investigate the heat conduction between film and substrate during sputtering process by multi-layer structure NiCr/NiSi film thermocouples

Cited by 3 publications

References 29 publications

Preliminary Investigation of Thermoelectric Electromotive Force Oscillation of NiCr/NiSi Thin Film Thermocouple in Dynamic Calibration

Preliminary Investigation of Thermoelectric Electromotive Force Oscillation of NiCr/NiSi Thin Film Thermocouple in Dynamic Calibration

Nanosecond-level second-order characteristics in dynamic calibration of thin film thermocouples by short-pulse laser

Sandwich probe temperature sensor based on In2O3-IZO thin film for ultra-high temperatures

Contact Info

Product

Resources

About

Sandwich probe temperature sensor based on In₂O₃-IZO thin film for ultra-high temperatures