Diamond Films Handbook 2002
DOI: 10.1201/9780203910603.ch1
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Cited by 28 publications
(47 citation statements)
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“…The main advantage of this technique is the generation of high concentration of the reactive species (radicals, atoms) that can form a coating with high deposition rates due to steep gradients in the boundary layer plasma -substrate. It has been obtained that the growth rate of hydrogenated amorphous carbon films (a-C:H) or polycrystalline diamonds produced by arc plasma jet technique can reach up to 100 nm/s [4][5][6][7]. Meanwhile, the growth rates of a-C:H obtained by traditional chemical vapour deposition (CVD) or physical vapour deposition (PVD) techniques are ten or hundred times lower compared to the arc plasma jet [8][9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
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“…The main advantage of this technique is the generation of high concentration of the reactive species (radicals, atoms) that can form a coating with high deposition rates due to steep gradients in the boundary layer plasma -substrate. It has been obtained that the growth rate of hydrogenated amorphous carbon films (a-C:H) or polycrystalline diamonds produced by arc plasma jet technique can reach up to 100 nm/s [4][5][6][7]. Meanwhile, the growth rates of a-C:H obtained by traditional chemical vapour deposition (CVD) or physical vapour deposition (PVD) techniques are ten or hundred times lower compared to the arc plasma jet [8][9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…Nowadays thermal plasmas are widely used for the production of ultrafine particles, formation of various coatings (ceramic, metal oxide, carbon), surface modification, or waste treatment [1][2][3][4]. The main advantage of this technique is the generation of high concentration of the reactive species (radicals, atoms) that can form a coating with high deposition rates due to steep gradients in the boundary layer plasma -substrate.…”
Section: Introductionmentioning
confidence: 99%
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