Introduction and Overview

Behrisch, R.; Eckstein, W.

doi:10.1007/978-3-540-44502-9_1

Cited by 95 publications

(120 citation statements)

References 134 publications

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“…Here, we summarize these phenomena and discuss those which are relevant for MAX phases. More thorough descriptions can be found in textbooks [115,116].…”

Section: Sputtering With Compound Targetsmentioning

confidence: 99%

The M+1AX phases: Materials science and thin-film processing

et al. 2010

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This article is a critical review of the M n+1 AX n phases ("MAX phases", where n =1, 2, or 3) from a materials science perspective. MAX phases are a class of hexagonal-structure ternary carbides and nitrides ("X") of a transition metal ("M") and an A-group element. The most well known are Ti 2 AlC, Ti 3 SiC 2 , and Ti 4 AlN 3 . There are ~60 MAX phases with at least 9 discovered in the last five years alone. What makes the MAX phases fascinating and potentially useful is their remarkable combination of chemical, physical, electrical, and mechanical properties, which in many ways combine the characteristics of metals and ceramics. For example, MAX phases are typically resistant to oxidation and corrosion, elastically stiff, but at the same time they exhibit high thermal and electrical conductivities and are machinable. These properties stem from an inherently nanolaminated crystal structure, with M n+1 X n slabs intercalated with pure A-element layers. The research on MAX phases has been accelerated by the introduction of thin-film processing methods.Magnetron sputtering and arc deposition have been employed to synthesize single-crystal material by epitaxial growth, which enables studies of fundamental materials properties. However, the surface-initiated decomposition of M n+1 AX n thin films into MX compounds at temperatures of 1000-1100 °C is much lower than the decomposition temperatures typically reported for the corresponding bulk material. We also review the prospects for low-temperature synthesis, which is essential for deposition of MAX phases onto technologically important substrates. While deposition of MAX phases from the archetypical Ti-Si-C and Ti-Al-N systems typically require synthesis temperatures of ~800 °C, recent results have demonstrated that V 2 GeC and Cr 2 AlC can be deposited at ~450 °C. Also, thermal spray of Ti 2 AlC powder has been used to produce thick coatings. We further treat progress in the use of first-principles calculations for predicting hypothetical MAX phases and their properties. Together with advances in processing and materials 3 analysis, this progress has led to recent discoveries of numerous new MAX phases such as Ti 4 SiC 3 , Ta 4 AlC 3 , and Ti 3 SnC 2 . Finally, important future research directions are discussed. These include charting the unknown regions in phase diagrams to discover new equilibrium and metastable phases, as well as research challenges in understanding their physical properties, such as the effects of anisotropy, impurities, and vacancies on the electrical properties, and unexplored properties such as superconductivity, magnetism, and optics. 4

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“…Here, we summarize these phenomena and discuss those which are relevant for MAX phases. More thorough descriptions can be found in textbooks [115,116].…”

Section: Sputtering With Compound Targetsmentioning

confidence: 99%

The M+1AX phases: Materials science and thin-film processing

et al. 2010

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“…The sputtering of meteoroid material and the scattering of atmospheric species at meteoroids are connected to the formation of high altitude meteors (section 3.4). Sputtering generally occurs for impacting ions, but also for other particles (for instance neutral atoms, molecules) and it occurs over a large range of energies from subkeV to MeV (we refer the reader to Behrisch and Eckstein 2007). A couple of percent of the sputtered species are ions and the removed atoms or ions are not necessarily in their ground states.…”

Section: Non-thermal Ablationmentioning

confidence: 99%

Dusty Plasma Effects in Near Earth Space and Interplanetary Medium

et al. 2011

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Dusty plasma effects in near earth space and interplanetary mediumSpace Science Reviews, 2011, Vol. 161, Issue 1-4: 1-47 10.1007/s11214-011-9762-3Access to the published version may require subscription. Published with permission from:Springer Science+Business Media B.V.Space Science Reviews manuscript No. (will be inserted by the editor) Dusty plasma effects in near Earth space and interplanetary mediumReceived: date / Accepted: date Abstract We review dust and meteoroid fluxes and their dusty plasma effects in the interplanetary medium near Earth orbit and in the Earth's ionosphere. Aside from in-situ measurements from sounding rockets and spacecraft, experimental data cover radar and optical observations of meteors. Dust plasma interactions in the interplanetary medium are observed by the detection of charged dust particles, by the detection of dust that is accelerated in the solar wind and by the detection of ions and neutrals that are released from the dust. These interactions are not well understood and lack quantitative description. There is still a huge discrepancy in the estimates of meteoroid mass deposition into the atmosphere. The radar meteor observations are of particular interest for determining this number. Dust measurements from spacecraft require a better understanding of the dust impact ionization process, as well as of the dust charging processes. The latter are also important for further studying nano dust trajectories in the solar wind. Moreover understanding of the complex dependencies that cause the variation of nano dust fluxes is still a challenge.

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“…The process of low energy sputtering is well understood and has been extensively studied for elemental targets. Both analytical theories and computer modelling have been employed [3].The picture gets more complex when sputtering from multi-component targets is considered, i.e. when partial sputtering yields and the surface composition evolution are of interest [4].…”

Section: Introductionmentioning

confidence: 99%

Modelling of low energy ion sputtering from oxide surfaces

Kubart¹,

Nyberg²,

Berg³

2010

J. Phys. D: Appl. Phys.

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The main aim with this work is to present a way to estimate values of the surface binding energy for oxides. This is done by fitting results from the binary collisions approximation code Tridyn, with data from the reactive sputtering processing curves, as well as the elemental composition obtained from X-ray photoelectron spectroscopy (XPS). Oxide targets of Al, Ti, V, Nb, and Ta are studied The obtained surface binding energies are then used to predict the partial sputtering yields.Anomalously high sputtering yield is observed for TiO 2 target. This is attributed to the high sputtering yield of Ti lower oxides. Such an effect is not observed for the other studied metals. XPS measurement of the oxide targets confirms the formation of suboxides during ion bombardment as well as an oxygen deficient surface in steady state. These effects are confirmed from the processing curves from the oxide targets showing an elevated sputtering rate in pure argon.

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Introduction and Overview

Cited by 95 publications

References 134 publications

The M+1AX phases: Materials science and thin-film processing

The M+1AX phases: Materials science and thin-film processing

Dusty Plasma Effects in Near Earth Space and Interplanetary Medium

Modelling of low energy ion sputtering from oxide surfaces

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