Introduction

Pivalate complexes of copper(ii) with aliphatic amines as potential precursors for depositing nanomaterials from the gas phase

“…In comparison, the focused electron beam induced deposition (FEBID) technique enables the formation of two- and three-dimensional nanostructures of precisely defined shapes and sizes, in the order of even 5–10 nm. 8–10 High lateral resolution can be achieved by controlling the electron beam's location and pulse duration. In the case of FEBID, volatile precursor molecules are introduced through the gas injection system (GIS) onto the substrate surface, where they adsorb and are decomposed by a focused electron beam in the order of keV energy.…”