Intrinsically Photopatternable High‐k Polymer Dielectric for Flexible Electronics
Gunoh Lee,
Seong Cheol Jang,
Ju Hyeok Lee
et al.
Abstract:The development of flexible and stretchable devices is crucial for realizing future electronics. In particular, for dielectric layer, conventional inorganic materials are limited by their brittle nature, while organic materials suffer from a low dielectric constant. Here, a novel intrinsically photopatternable high‐k Parylene‐based thin film (Parylene‐OH) is fabricated via a chemical vapor deposition process based on the Gorham method, which provides pin‐hole free, conformal polymeric film on any type of surfa… Show more
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