Intrinsic dissipation in high-frequency micromechanical resonators

Mohanty, Pritiraj; Harrington, D. A.; Ekinci, K. L.; Yang, Yi; Murphy, M. J.; Roukes, M. L.

doi:10.1103/physrevb.66.085416

Cited by 295 publications

(229 citation statements)

References 66 publications

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“…8,9 In order to improve the sensitivity of the NEMS sensors microscopic mechanisms of energy loss have also been studied extensively. 10,11 Thermal properties like thermal conductivity and expansion coefficient can play an important role in the performance of NEMS devices. Thermal stresses originating in localized heating have been little studied, and can result in variation of resonant frequencies of NEMS devices.…”

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confidence: 99%

“…This energy loss can be due to various factors such as thermoelastic dissipation, surface losses, viscous damping, and clamping losses. 10,28,29 The quality factor was extracted and studied as a function of the applied been observed in systems of GaAs, Si, and diamond. 10,11 The origin of this complex temperature dependence is not fully understood.…”

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confidence: 99%

“…10,28,29 The quality factor was extracted and studied as a function of the applied been observed in systems of GaAs, Si, and diamond. 10,11 The origin of this complex temperature dependence is not fully understood. In addition, we observe that the loss at 13 K bath temperature is always lower than the loss at 30 K even when the average temperature of the nanowire is the same.…”

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confidence: 99%

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Nanoscale Electromechanics To Measure Thermal Conductivity, Expansion, and Interfacial Losses

et al. 2015

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We study the effect of localized Joule heating on the mechanical properties of doubly clamped nanowires under tensile stress. Local heating results in systematic variation of the resonant frequency; these frequency changes result from thermal stresses that depend on temperature dependent thermal conductivity and expansion coefficient. The change in sign of the linear expansion coefficient of InAs is reflected in the resonant response of the system near a bath temperature of 20 K. Using finite element simulations to model the experimentally observed frequency shifts, we show that the thermal conductivity of a nanowire can be approximated in the 10-60 K temperature range by the empirical form κ = bT W/mK, where the value of b for a nanowire was found to be b = 0.035 W/mK 2 , significantly lower than bulk values. Also, local heating allows us to independently vary the temperature of the nanowire relative to the clamping points pinned to the bath temperature. We suggest a loss mechanism

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Nanoscale Electromechanics To Measure Thermal Conductivity, Expansion, and Interfacial Losses

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“…was found to obey the rough scaling with volume [220][221][222], Q m ∝ V 1/3 m , suggesting that conventional nanomechanical oscillators may not simultaneously achieve low mass and high Q m . A welcome break from this trend was observed in nanostring oscillators with intrinsic In the approach followed in this thesis, building upon an earlier generation of work [228], the nanobeam and micro-cavity are heterogeneously integrated on a chip for improved technical stability, making it convenient for cryogenic deployment.…”

Section: Stressed Nanostring Coupled To An Optical Microcavitymentioning

confidence: 99%

Quantum Limits on Measurement and Control of a Mechanical Oscillator

Sudhir

2018

Springer Theses

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PAR Vivishek SUDHIR JOSEPH CONRAD, Heart of DarknessExperimental physics demands a certain degree of manual dexterity, the patience to tolerate the mundane, and an inexhaustible supply of optimism. Tobias hired me to work on an immensely sophisticated experiment despite any proof of my possessing these qualities; I am indebted to him for the belief he has placed in me. I would also like to acknowledge his dedication to fostering an environment where the pursuit of science is unencumbered by other worldly concerns. Stefan, Ewold and Samuel bore the brunt of a theorist trying to perform delicate experiments; the stern, yet encouraging, stewardship of this trio ensured that I enjoyed the culture shock. Dal Wilson was more than a colleague and a post-doc; his pragmatic approach to physics provided the ideal counter-point in our attempts to forge a deeper understanding of things ranging from vibration isolation to the subtleties of quantum mechanics. Without the patient efforts of Amir, Ryan and Hendrik in designing, fabricating, and testing of devices, none of the results reported here would have been possible. I hope I have been able to bequeath a better vision of the future of our experiment to Sergey. Conversations with Alexey, Daniel and Nathan have enabled me to vicariously learn how to measure microwave "photons". John Jost once taught me how to decorate a Christmas tree; since then he has imparted some wisdom on frequency metrology, and some on atomic physics. Together with Dal, Victor and Caroline have probably spent the most time with me outside the lab; it was fun to exercise an air of social normalcy with this bunch. Christophe has been an amazing sparring partner on every subject capable of being brought under scientific scrutiny.The personal space required for the pursuit of science comes through the sacrifice of many people. My family back home in India -parents, sister, grand-parents -have had to patiently wait for the brief interludes when I go home. No words can do justice to this and the very many other pleasures they have surrendered over the years for my sake. Before physics attracted me, I was charmed by someone else; I am lucky to have married her. Long time friends, mentorsAjith and Subeesh -have played pivotal roles in my being able to engage in physics; I hope to repay this enormous debt, some day.It was a privilege to have learnt from a few great teachers during my formative years. Their vision of an indelible unity in nature continues to motivate my study of physics. vii AbstractThe precision measurement of position has a long-standing tradition in physics. Cavendish's verification of the universal law of gravitation using a torsion pendulum, Perrin's confirmation of the atomic hypothesis via the precise measurement of the Brownian motion, and, the verification of the mechanical effect of electromagnetic radiation, all belong to this classical heritage. Quantum mechanics posits that the measurement of position results in an uncertain momentum; an idea developed to full maturity within the ...

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“…Energy losses in a microscale resonator can be attributed to several factors, including ambient damping, anchor-based clamping losses, thermoelastic damping (TED), and internal friction of the structural material. (6,7) The total energy loss in the system is simply calculated as the sum of the energy loss components and can be written as follows:…”

Section: Introductionmentioning

confidence: 99%

Solid Internal Energy Dissipation of 3C Single-Crystal Silicon Carbide Micromechanical Resonators by Heterojunction Growth on Silicon

2010

Sensors and Materials

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A previous report shows that a 100-nm-thick free-free beam, single-crystal silicon carbide (SiC) resonator has quality factors 10 times lower than those made with a 10-μm-thick single-crystal SiC cantilever even though the free-free beam is supposed to have lower clamping loss. (1,2) This manuscript explores the above-mentioned difference using the heterojunction growth of (110) 3C-silicon carbide deposited as structural fi lms of micromechanical resonators on single-crystal silicon and polycrystalline silicon. The polycrystalline SiC resonators with smaller clamping losses were fabricated to contrast with the resonators made of single-crystal SiC. The analysis showed that solid internal energy dissipation may play a more important role than the other losses operated in tens of kilohertz. The resonators with a 2-μm-thick single-crystal SiC having Qs between the previous reports may suggest a higher defect density near the interface, which causes high solid internal dissipation. Although an electrical measurement technique was used, the dominance of this material property appeared to be due to grain size instead of conductivity.

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Intrinsic dissipation in high-frequency micromechanical resonators

Cited by 295 publications

References 66 publications

Nanoscale Electromechanics To Measure Thermal Conductivity, Expansion, and Interfacial Losses

Nanoscale Electromechanics To Measure Thermal Conductivity, Expansion, and Interfacial Losses

Quantum Limits on Measurement and Control of a Mechanical Oscillator

Solid Internal Energy Dissipation of 3C Single-Crystal Silicon Carbide Micromechanical Resonators by Heterojunction Growth on Silicon

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