The lithium salt of Me 3 CSiMe 2 NH 2 reacted with halosilanes to give the bis(silyl)amines 1-3, Me 3 -CSiMe 2 NHSiMe 2 R (1: R ) H, 2: R ) Me, 3: R ) CMe 3 ), which form lithium salts with BuLi. 4, the lithium salt of 1, crystallized as the trimer via the Li-N bond. Halosilanes reacted with lithiated bis-(silyl)amines to give tris(silyl)amines 5-9, RSiMe 2 N(SiMe 2 Hal)SiMe 2 R′ (5: R, R′ ) Me, Hal ) Cl; 6: R, R′ ) Me, Hal ) F; 7: R ) CMe 3 , R ) Me, Hal ) Cl; 8: R ) CMe 3 , R′ ) Me, Hal ) F; 9: R, R′ ) CMe 3 , Hal ) F). The ammonolysis of 5 and 7 led to the formation of the NH 2 -substituted compounds 10 and 11, RSiMe 2 N(SiMe 3 )SiMe 2 NH 2 (10: R ) Me, 11: R ) CMe 3 ). The fluorine-containing compounds (6, 8, 9) reacted with LiNH 2 to give the 1,3,5-trisila-2,4-diazanes 12-14, RSiMe 2 -NH-SiMe 2 -NH-SiMe 2 R′ (12: R, R′ ) Me; 13: R ) Me, R′ ) CMe 3 ; 14: R, R′ ) CMe 3 ). 10 and 12 as well as 11 and 13 are structural isomers. 12 and 13 are the result of a 1,3-silyl group migration in solution at low temperatures. Thermally the 1,3-silyl group migration occurred above 200 °C for 10 and at 130 °C using 11. Quantum-chemical calculations on the thermal isomerization process reveal a two-step mechanism, whereas the anionic isomerization occurs via a single transition state at lower temperatures. 10 and 12 form the same lithium salt (15), (Me 3 SiNH-SiMe 2 -NLi(THF)-SiMe 3 ) 2 . In the reaction of 15 with FSiMe 2 CMe 3 or of the lithiated compounds of 13 with ClSiMe 3 (Me 3 Si) 2 NSiMe 2 NHSiMe 2 CMe 3 (16) was obtained (eq 8). Starting from 15, the reaction again includes a 1,3-silyl group migration from one nitrogen to the other. In the reaction of lithiated 14 with ClSiMe 3 substitution occurred and 17 was obtained. Crystal structures of 4 and 15 are presented, and the mechanisms of the rearrangements are discussed.