Interpreting interferometric height measurements using the instrument transfer function

Groot, Peter J. de; Lega, Xavier Colonna de

doi:10.1007/3-540-29303-5_3

Cited by 60 publications

(62 citation statements)

References 6 publications

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“…There are different approaches to characterize the lateral resolution of microscopic 3D-measuring systems. 9,10 However, none of these corresponds to the measuring results we obtained from a UV illuminated Linnik type SWLI.…”

Section: Introductionmentioning

confidence: 73%

“…Illuminating with 600 nm the interferometer should not be able to resolve the 1.2 μm nor the 0.6 μm pitch length. According to the ITF as defined by de Groot et al 9 the measured normalized modulation depth should be clearly below one at a pitch length of 1.2 μm and close to zero at 0.6 μm pitch. Due to non-linear transfer characteristics of the interferometer the measurement results differ from the theoretical considerations.…”

Section: Experimentamentioning

confidence: 90%

“…Corresponding to tactile instruments the German guideline VDI/VDE 2655-1.1, which deals with the calibration of interference microscopes, introduces a short cutoff wavelength related to the surface structure. 9 In this approach the measured height of a rectangular grating structure decreases if the spatial frequency increases, i.e. the instrument shows a low pass characteristic.…”

Section: Lateral Resolution In Swlimentioning

confidence: 99%

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Low coherent Linnik interferometer optimized for use in nano-measuring machines

Niehues

Lehmann

Xie

2012

Meas. Sci. Technol.

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The precise acquisition of three-dimensional geometrical data in micro-and nanotechnology is crucial for advanced fabrication processes. Scanning white-light interferometry (SWLI) achieves nanometer resolution in the axial direction, but the lateral resolution is far more critical. The requirements for an areal measuring optical sensor in a Nano Measuring Machine are very high. The resolution in every dimension and the working distance have to be as high as possible. In contrast to a Mirau interferometer a Linnik interferometer does not need any components in front of the objective lens. This benefit permits both, a long working distance and a high lateral resolution. In the EC-funded project "NanoCMM" we developed a Linnik interferometer providing a working distance of more than 5 mm and a lateral resolution of 0.3 μm. With this interferometer we measured the full modulation depth and the rectangular shape of a pitch standard close to the Rayleigh resolution limit.

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Section: Introductionmentioning

confidence: 73%

Section: Experimentamentioning

confidence: 90%

Section: Lateral Resolution In Swlimentioning

confidence: 99%

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Low coherent Linnik interferometer optimized for use in nano-measuring machines

Niehues

Lehmann

Xie

2012

Meas. Sci. Technol.

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“…The limited numerical aperture of our objective (NA=0.3) prevents the light scattered at an angle larger than arcsin(NA) to be observed. Reducing the scattering angle cone corresponds to the operation of filtering out from the complex scattered field the spatial frequencies above NA/λ [21,22]. In the fitting routine, when computing f, we take into account this effect by filtering out frequency components larger than the cutoff value.…”

Section: Methodsmentioning

confidence: 99%

Holographic tracking and sizing of optically trapped microprobes in diamond anvil cells

et al. 2016

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We demonstrate that Digital Holographic Microscopy can be used for accurate 3D tracking and sizing of a colloidal probe trapped in a diamond anvil cell (DAC). Polystyrene beads were optically trapped in water up to Gigapascal pressures while simultaneously recording in-line holograms at 1 KHz frame rate. Using Lorenz-Mie scattering theory to fit interference patterns, we detected a 10% shrinking in the bead's radius due to the high applied pressure. Accurate bead sizing is crucial for obtaining reliable viscosity measurements and provides a convenient optical tool for the determination of the bulk modulus of probe material. Our technique may provide a new method for pressure measurements inside a DAC.

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“…The starting point for these simulations is a physical model F(x x i ;p p k )~y of the measurement process, wherex x i represents the measurement condition for the ith data point andp p k contains the model parameters (e.g., critical dimension (CD), height, side wall angle (SWA), etc.). All known influences that contribute to the formation of the measured quantity have to be taken into account; this includes the light source, instrument transfer function, 12 aberrations and sensor features. Having a simulation model of the measurement system makes it possible to create a database filled with templates that represent different measurement configurations (x x ) or variations in the structure parameters (p p).…”

Section: Solving the Inverse Problem By Model-based Feature Reconstrumentioning

confidence: 99%

Solving the inverse grating problem by white light interference Fourier scatterometry

et al. 2012

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Scatterometry is a well-established, fast and precise optical metrology method used for the characterization of sub-lambda periodic features. The Fourier scatterometry method, by analyzing the Fourier plane, makes it possible to collect the angle-resolved diffraction spectrum without any mechanical scanning. To improve the depth sensitivity of this method, we combine it with white light interferometry. We show the exemplary application of the method on a silicon line grating. To characterize the sub-lambda features of the grating structures, we apply a model-based reconstruction approach by comparing simulated and measured spectra. All simulations are based on the rigorous coupled-wave analysis method.

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Interpreting interferometric height measurements using the instrument transfer function

Cited by 60 publications

References 6 publications

Low coherent Linnik interferometer optimized for use in nano-measuring machines

Low coherent Linnik interferometer optimized for use in nano-measuring machines

Holographic tracking and sizing of optically trapped microprobes in diamond anvil cells

Solving the inverse grating problem by white light interference Fourier scatterometry

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