1994
DOI: 10.1139/v94-089
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Internal, translational, and angular momentum product state distributions of CuF molecules desorbing associatively from copper surfaces

Abstract: , 643 (1994). The dry etching reaction of solid copper surfaces with fluorine atoms or molecules has been studied with laser-induced fluorescence spectroscopy. The reaction product, copper monofluoride, CuF, is produced in the X'C+ electronic ground state and desorbs into the gas phase at surface temperatures above approximately 750 K. Rotationally resolved LIF excitation spectra of the C ' n + XIC+ band system of CuF molecules desorbing from an isotopically purified 6 ' C~ polycrystalline sample are obtained … Show more

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Cited by 5 publications
(6 citation statements)
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“…The analysis of the experimental data show that the CuF molecules desorb from the surface with a cos n θ, n = 1 distribution, with a translational temperature that agrees with the surface temperature within the error limits, independent of the rovibrational levels. This, in addition to previous internal product distribution analysis, is a further proof of an indirect reaction mechanism. Hence, the steps of the F 2 /Cu system may be addressed to as …”
Section: Discussionsupporting
confidence: 72%
See 1 more Smart Citation
“…The analysis of the experimental data show that the CuF molecules desorb from the surface with a cos n θ, n = 1 distribution, with a translational temperature that agrees with the surface temperature within the error limits, independent of the rovibrational levels. This, in addition to previous internal product distribution analysis, is a further proof of an indirect reaction mechanism. Hence, the steps of the F 2 /Cu system may be addressed to as …”
Section: Discussionsupporting
confidence: 72%
“…The method is applied to the F 2 /Cu gas−surface reaction. This system has been investigated thoroughly in terms of internal product-state distributions in our laboratory . The angular and velocity distributions in this study completes the product-state analysis of CuF molecules desorbing associatively from Cu surfaces.…”
Section: Introductionmentioning
confidence: 55%
“…The copper sample is mounted in a chamber, which is evacuated The square root refers to coherent saturation which has been determined for the conditions of this experiment (see Ref. [11]). Fluorescence detection with the CCD camera implies an integration of the intensity Ifluores.…”
Section: Methodsmentioning
confidence: 99%
“…The high sample temperature during the experiments and the fluorine exposure effectively prevent any accumulation of residual gas on the surface, as verified by Auger electron spectroscopy (AES) [12]. Artifacts due to minor surface contaminants outside the detection limit of AES can be excluded, since no time dependence of the product CuF fluorescence intensity was noticed [11]. To define the reaction region and to reduce thermal background radiation of the sample heater, the surface is covered with a tantalum aperture with an opening of 2 x 5 mm.…”
Section: Methodsmentioning
confidence: 99%
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