Internal stress and optical properties of Nb_2O_5 thin films deposited by ion-beam sputtering

Abstract

The influence on the internal stress and optical properties of Nb2O5 thin films with ion-beam energy was investigated. Nb2O5 thin films were deposited on unheated glass substrates by means of ion-beam sputtering with different ion-beam voltage, Vb. The refractive index, extinction coefficient, and surface roughness were found to depend on the ion-beam energy. The stresses in thin films were measured by the phase-shifting interferometry technique. The film stress was also found to be related to Vb, and a high compressive stress of -0.467 GPa was measured at Vb = 850 V. The Nb2O5-SiO2 multilayer coatings had smaller average compressive stress as compared with single-layer Nb2O5 film.

Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOxfilm growth

“…Since NbO x or Nb 2 O 5 films are frequently used as optical thin films due to their high transmittance, high refractive index and chemical stability [28][29][30][31], we performed a brief characterisation of their optical properties. As shown in Fig.…”

Electronic structures, elastic and optical properties of M2O5 (M = V, Nb, Ta)

“…Balog et al [7] performed further studies on V 2 O 5 at high temperature and pressure conditions (1500°C, 29 GPa) and confirmed that HPP1 and HPP2 are β-V 2 O 5 and B-V 2 O 5 , respectively. Moreover, the numerous excellent electrical, optical, and physical-chemical properties of M 2 O 5 have encouraged theoretical and experimental investigations of these compounds [8][9][10][11][12][13][14][15][16][17][18][19]. Given its large flux of ion implantation and outlet, large lithium-ion storage density, and stable properties in the polymer electrolyte, V 2 O 5 film might be applied in the electrode layer [8,9].…”

“…This film has been widely applied in various fields [11,12]. attention from researchers [13][14][15]; they have been applied in various optical thin films and photoelectronic devices [16][17][18][19].…”

Optical Properties of Sol-Gel Nb2O5Films with Tunable Porosity for Sensing Applications

“…Besides, many applications in photonics demand high refractive index materials with good optical quality and negligible scattering. Thus, various innovative applications have been developed and thin Nb 2 O 5 films have found applications in photonics for improving the optical performance of different devices such as optical filters [4], waveguide-based optical circuits [5], and transparent conductive electrodes [6]. A number of novel applications of Nb 2 O 5 films rely on the ability to deposit high quality films using relatively simple and inexpensive techniques such as sol-gel and spin or dip coating.…”