Interlaboratory study on linewidth measurements for antireflective chromium photomasks

Jerke, J. M.; Croarkin, M. C.; Varner, Ruth N

doi:10.6028/nbs.sp.400-74

Cited by 6 publications

(9 citation statements)

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“…The study also demonstrated that the same system when properly calibrated using a linewidth artifact would produce linewidth measurements with negligible systematic errors (Jerke et al [23]).…”

Section: Models For a Measurement Systemmentioning

confidence: 89%

Measurement assurance programs

Croarkin¹

1984

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This document is a guide to the logical development of a measurement assurance program in which the tie between a measurement and its reference base is satisfied by measurements on a transfer standard. The uncertainty of values reported by the measurement process is defined; and the validation of this uncertainty for single measurements is developed. Measurement sequences for executing the transfer with NBS and procedures for maintaining statistical control are outlined for eight specific measurement situations with emphasis on characterizing parameters of the measurement process through use of a check standard.

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Section: Models For a Measurement Systemmentioning

confidence: 89%

Measurement assurance programs

Croarkin¹

1984

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“…These and other topics are discussed more fully in the references [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. The need to use good measurement techniques to achieve the best results with these linewidth standards cannot be overemphasized.…”

Section: Bmentioning

confidence: 99%

Standard Reference Materials :

Varner¹,

Vezzetti²

1992

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“…These and other topics are discussed more fully in the references [1,14]. The need to use good measurement techniques to achieve the best results with these linewidth standards cannot be overemphasized.…”

Section: Special Precautionsmentioning

confidence: 99%