International Conference on Space Optics — ICSO 2010 2019
DOI: 10.1117/12.2552558
|View full text |Cite
|
Sign up to set email alerts
|

Interferometric system for Pm‐level stability characterization

Abstract: We present a double sided, single pass Michelson heterodyne interferometer for dimensional stability measurements. In preliminary measurements, the double deadpath configuration (no sample) showed better than ±1.5 nm (2σ) over 13 hours. A 30 mm stainless gauge block was then measured with a stability of ±1.2 nm (2σ) over 9 hours. The interferometer was then moved to a facility capable of measuring in vacuum. In a pressure sealed environment, but not vacuum, the interferometer stability was better than ±0.6 nm … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 4 publications
(4 reference statements)
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?