Interferometric dynamic displacement measurement using phase-modulated light along with stepwise control of operation point

Tanaka, Yosuke; Ueda, Kohei

doi:10.7567/apex.11.112501

Cited by 20 publications

(14 citation statements)

References 20 publications

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“…The average target voltage amplitude of the CTSC was 5.79 times larger than that of CWS. The enhancement of the target voltage amplitude to the same vibration reveals the improved resolution of CTSC, and the resolution of vibration detection was improved to a 7 nm level, which was previously achieved by complex optical detection methods. − …”

Section: Resultsmentioning

confidence: 77%

Achieving Ultrasensitivity and Long-Term Durability Simultaneously for Microcantilevers Inspired by a Scorpion’s Circular Tip Slits

et al. 2022

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Microcantilevers are one of the most essential sensitive elements for various mechanical sensors. Their sensing performance determines the index level of a series of sensors. To date, the long-standing trade-off between ultrasensitivity and long-term durability of microcantilevers still remains a challenge. In nature, scorpions can sense vibrations as low as 10 nm amplitude through their circular tip slits sensilla. Such slit sensilla embedded in the exoskeleton of walking legs endure the compressing and stretching of every movement without spontaneous fracture failures. Here, we focused on the structural design of the circular tip slits which concentrate stress effectively and disperse energy smoothly, with the result that the microcantilevers are ultrasensitive and durable simultaneously in a single element. We devised a reproducible circular tip slits cantilever with enhanced sensitivity and ultralow detection limits to monitor 7 nm amplitude vibrations. The sensor possessed excellent durability and remained highly consistent with the correlation coefficient of nearly 0.999 over 100 000 cycles. Furthermore, the circular tip slits cantilever could precisely sense diverse subtle mechanical signals and exhibited potential applications in monitoring respiratory patterns. The simple geometric design can be easily manufactured on various sensory materials for applications requiring ultrahigh sensitivity and long-time durability.

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Section: Resultsmentioning

confidence: 77%

Achieving Ultrasensitivity and Long-Term Durability Simultaneously for Microcantilevers Inspired by a Scorpion’s Circular Tip Slits

et al. 2022

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“…The interferometric measurement is effective in many cases especially for measuring a displacement of less than the optical wavelength. In our research team, we have been studying a dynamic displacement measurement using a phase-modulated interferometer [5][6][7][8][9][10][11][12][13] , which can measure an unsteady movement of several tens of nanometers with a frequency up to 100 MHz 7 . On the other hand, incoherent methods including time-of-flight and modulation methods are useful for large displacement measurement ranging from millimeters to meters.…”

Section: Introductionmentioning

confidence: 99%

Real-time laser shape measurement using intensity correlation with phase modulation signal

Kumano¹,

Ideno²,

Endo³

et al. 2023

SPIE Future Sensing Technologies 2023

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Application of laser displacement measurement is expected in various fields such as manufacturing, medical care, and inter-vehicle distance measurement. In this paper, we demonstrate real-time shape measurement using a laser displacement measurement system based on intensity correlation with phase modulation signals, which we have been studying for years. The intensity-correlation-based laser displacement measurement system measures the intensity correlation between the probe light signal and the phase-modulated electrical reference signal by using an optical modulator. The displacement of an object is measured in real time from a simple calculation using the fundamental and second harmonic frequency components of the intensity correlation signal. The measurement range can be freely adjusted by the modulation frequency applied to the probe and local light. In the previous study, we also developed a method to extend the measurement range without deteriorating the measurement accuracy. Furthermore, the proposed system does not need sophisticated highfrequency circuits, because multiplication operation necessary for intensity correlation measurement is performed optically by using an optical modulator. In this study, we have developed an experimental setup for scanning the probe laser beam on the sample and combined it with the laser displacement measurement system. In the experiment, we used a sample with a stepwise profile composed of aluminum mirrors and successfully measured the shape of flat surfaces and steps within an error range of the order of 10 -5 m.

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“…The coherent-based distance or displacement measurement systems using interferometry can provide very accurate measurements within the range of laser coherence. [1][2][3][4][5][6][7][8][9][10][11] The highest performance of interferometric measurement is represented by the application to gravitational wave detection. 11) The incoherent-based measurement systems based on triangulation, [12][13][14] confocal detection, 15) time-of-flight, [16][17][18] or signal phase shift [19][20][21] can also provide high accuracy.…”

mentioning

confidence: 99%

Laser displacement measurement using intensity modulation with a phase-modulated radio-frequency signal

Tanaka

Yamaguchi

Yamamoto

et al. 2020

Appl. Phys. Express

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We demonstrate a laser-based displacement measurement using an intensity modulator as a simple and wide-band intensity correlator. The proposed method applies intensity modulation not only to the output probe beam but also to the reflected beam from a target, where the fundamental frequency of modulation signal is the same for both, but the phase of modulation signal for the reflected beam is also modulated. The displacement is measured using harmonic signals from a photodetector. The principle is verified for 40 mm and 16 m ranges of displacement measurement, where the relative measurement uncertainty of 1.8 × 10 − 6 is achieved.

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Interferometric dynamic displacement measurement using phase-modulated light along with stepwise control of operation point

Cited by 20 publications

References 20 publications

Achieving Ultrasensitivity and Long-Term Durability Simultaneously for Microcantilevers Inspired by a Scorpion’s Circular Tip Slits

Achieving Ultrasensitivity and Long-Term Durability Simultaneously for Microcantilevers Inspired by a Scorpion’s Circular Tip Slits

Real-time laser shape measurement using intensity correlation with phase modulation signal

Laser displacement measurement using intensity modulation with a phase-modulated radio-frequency signal

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